The complete UHP solution – from a single supplier
UHP gas analysis for a range of impurities is essential to semiconductor wafer fabrication, helping to manage quality control, gas purity and leak detection.
Creating a gas analysis system that covers all the necessary measurements, with equipment sourced from different suppliers, can lead to integration issues between hardware and software.
Servomex empowers ultra-high-purity gas production processes with an integrated, reliable, single-supplier solution that seamlessly combines industry-leading technologies to deliver the low detection limits required.
Even the smallest impurities can cause major defects in a semiconductor wafer, creating costly scrap and waste.
To avoid contamination and ensure the purest gases are used, semiconductor manufacturers use many different resources, including:
• Strict gas supplier specifications
• Multiple gas purification techniques
• Real-time continuous gas purity monitoring
• Post-process inspection
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