Axis 1
Axis 2
Linear Positioner X
Metrology & Inspection
Lithography Process
• Accurate Beam Aperture & Filter Positioning
Axis 3
Goniometer
Axis 1
Axis 3
Goniometer
Axis 2
Y
10°
Linear Positioner X
X
Linear Positioner X
10°
Linear Positioner Y
Linear Positioner Y
360°
Goniometer
Goniometer
Rotator
Horizontal Z
Connecting Fiber
Axis 1
2
3
Axis 1
Control Unit IDS3010
Sensor Heads
Linear Positioner Y
360°
Connecting Fiber
Axis 1
Axis 2
Axis 3
Control Unit IDS3010
Axis 3
Sensor Heads
Z
Y
Linear Positioner Y
Linear
1
Positioner
Axis 2Y
Axis 2
Axis 3
Goniometer
X
X
Linear Positioner X
Linear Positioner X
10°
Z
10°
Goniometer
Rotator
Goniometer
Horizontal Z
Linear Positioner Y
Y
Goniometer
Linear Positioner Y
Control Unit IDS3010
Linear Positioner Y
360°
Connecting Fiber
Axis 1
Axis 2
Axis 3
Rotator
Sensor Heads
Horizontal Z
Connecting Fiber
Axis 1
Axis 2
Axis 3
Y
Z
Linear Positioner Y
360°
Control Unit IDS3010
Sensor Heads
Z
Rotator
Horizontal Z
Connecting Fiber
Axis 1
Axis 2
Axis 3
Z
Y
X
Control Unit IDS3010
Sensor Heads
Horizontal Z
Linear Positioner Y
Linear Positioner X