A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 4

Aerosolization
Definition
- +
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-
+
-
-
-
+
+
+
+
-
+
-
-
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+
-
-
-
-
+
-
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Liquid Sample
With NVR
- + +
-
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- +
-
+
- + - + -
+ -
- +
- + - +
- +
- +
- +
+
+
+ - -
- +
-
- + - +
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- +
+
- - +
+
- +
+
- + -
- +
-
- -
+
+-
+
- + - +
- +
+
-
-
- +
- +
-
+
+
-
-
+
-
- +
+
+
- - +
- +
- +
+
+
-
-
-
- +
+
+
-
+
-
+ -
- +
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+
-
-
-
+
+
- +
- + + -
+ - + -
-
-
+
-
-
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+
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+
Nebulized
Sample
Kanomax FMT Proprietary and
Confidential, slide 4
Aerosolized
Sample