A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 3

Established Aerosol Sizing Technologies
Aerosol Technologies for Sizing Nanoparticles
Nanoparticle size
distribution
measurement
Inertial Separation
Optical Detection
Thermophoretic Sampling
Mostly used Electrical Mobility Classfication
1
10
100
Kanomax FMT Proprietary and
Confidential, slide 3
1000
nm