A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 2

Challenges in Colloid Sizing Technologies
Dynamic light scattering
– Requires high concentrations
– Dependent on sample temperature and
viscosity
– No concentration information
– Inconsistent multimodal performance
Nanoparticle Tracking Analysis
Dynamic Light Scattering Theory
By Mike Jones - Own work, CC BY-SA 3.0,
https://commons.wikimedia.org/w/index.php?curid=10502233
– Functional down to 20 nm
– Dependent on sample temperature and
viscosity
Liquid Nanoparticle Sizing System
– Application to measurements at
previously unattainable size thresholds
Nanoparticle Tracking Analysis image
By Thegnarlypanda - Own work, CC BY-SA 3.0,
https://commons.wikimedia.org/w/index.php?curid=11621345
Kanomax FMT Proprietary and
Confidential, slide 2