A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 5

Quantifying Colloid Concentration
•
•
In situ optical techniques do not provide
concentration information
Microscopy methods are costly and time
consuming
Volume concentration standards provide
method to calibrate the true aerosolization
rate, R Aerosol
Colloid
Sample
Nebulization
(1-2 mL/min)
Large Drop
Removal
(~0.6 μL/min)
R Aerosol =
C Vol , Aerosol Q Aerosol
C Vol , Hydrosol
Aerosol
Volume
Concentraiton
Measurement
Evaporation
•
Diameter
Kanomax FMT Proprietary and
Confidential, slide 5