A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 11

Aerosolized Particle Size Characterization
Annular Flow Ion Mobility Spectrometer (AFIMS, Kanomax 3660)
Principle of Operation – Electrical Mobility Classification
• Annular Flow Ion Mobility
Classifier (AFIMC) acts as a
“bandpass” filter based on
particle size
• Measurement of particle
concentrations over a range
of selected sizes provides
particle size distribution
information
• Data inverted to account for
charging and detection
efficiency of the aerosol
particle counter
Kanomax FMT Proprietary and
Confidential, slide 11