A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 10

Nanoparticle Nebulizer Applications
30 nm Colloidal Silica Standard Particles
• Kanomax NanoParticle
Nebulizer reduces
interference from
Precipitated Non-
Volatile Residue
– Overlapping peaks
– Errors in particle
diameter due to
PNVR coating
• Allows for particle size
distribution
measurements at
smaller particle
diameters and at
higher dissolved
residue levels than
traditional systems
Litchy, M. et.al.: Pittcon 2012
Kanomax FMT Proprietary and
Confidential, slide 10