A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 12

Aerosolized Particle Concentration Measurement
Annular Flow Ion Mobility Spectrometer (AFIMS, Kanomax 3660)
Principle of Operation – Condensation Particle Counter
• Heated Saturator adds butyl
alcohol vapor to the aerosol
• Cooled Condenser causes
the butyl alcohol vapor to
become supersaturated
• Supersaturated butanol vapor
condenses onto particles in
the aerosol making large
droplets
• Droplets counted optically
using light scattering (“Dry”
particles are not detected)
Kanomax FMT Proprietary and
Confidential, slide 12