Univ of Illinois Micro + Nanotechnology Lab 2016 Highlights Report | Page 21

Energy conservation projects
New crystal growth capabilities

FACILITY UPDATES

Energy conservation projects

MNTL is poised to save $ 12 million in energy costs over the next 20 years thanks to the campus Energy Service Company( ESCO) initiative. Most of the cost savings will be realized in MNTL’ s cleanrooms through new occupancy and particulate sensors, an air damper system, building control systems, centralized process water loops, upgraded air handlers, and new steam traps.
As a result of this work, which was mostly completed in 2016, the particulate air quality and room temperature is now controlled independently for each cleanroom bay, whereas before the labs were controlled in pairs. The ESCO project is providing MNTL facility users with a better overall research experience.
In all, ESCO upgrades and renovations are being completed in four other College of Engineering facilities: Frederick Seitz Materials Research Lab, Loomis Lab, Engineering Sciences Building, and the Superconductivity Center. The total energy savings for all these facilities will be $ 41 million over the next 20 years.

New crystal growth capabilities

MNTL researchers are using the Aixtron MOCVD reactor to develop III-V compound semiconductorbased materials and devices like nanowire solar cells and next-generation transistors. The deposition system, which provides superior process flexibility and intrinsic uniformity, is available for use by researchers from outside of the University of Illinois. Contact us at 217.333.3097 for more information. micro + nanotechnology lab | 19 | 2016 highlights report