510
J. Eur. Opt. Society-Rapid Publ. 22, 51( 2026)
Cryst. Solids 355, 13( 2009). https:// doi. org / 10.1016 / j. jnoncrysol. 2009.01.037.
11. Katardjiev IV, Carter G, Nobes MJ, The modelling of surface evolution during growth and erosion, Int. J. Numer. Model. 3, 2( 2005). https:// doi. org / 10.1002 / jnm. 1660030209.
12. Da Costa Fernandes B et al., Understanding the effect of wet etching on damage resistance of surface scratches, Sci. Rep. 8, 1( 2018). https:// doi. org / 10.1038 / s41598-018- 19716-0.
13. Krishna E, Sreelakshmy K, Medha Lal R, Comparative study on the effects of dry and wet etching on surface characteristics of fused silica optics, Opt. Mater. 162, 116809( 2025). https:// doi. org / 10.1016 / j. optmat. 2025.116809.
14. Jiao P et al., Morphology evolution of Vickers indentation in fused silica glass etched by atmospheric pressure plasma jet, Ceram. Int. 48, 21( 2022). https:// doi. org / 10.1016 / j. ceramint. 2022.07.069.
15. Meister J, Arnold T, New process simulation procedure for high-rate plasma jet machining, Plasma Chem. Plasma Process. 31, 1( 2010). https:// doi. org / 10.1007 / s11090-010- 9267-y.
16. Arnold T, Böhm G, Paetzelt H, Ultra-precision surface machining with reactive plasma jets, Contrib. Plasma Phys. 54, 2( 2014). https:// doi. org / 10.1002 / ctpp. 201310058.
17. Müller, H et al., Atmospheric plasma jet processing for figure error correction of an optical element made from S-BSL7, J. Eur. Opt. Soc. Rapid Publ. 18, 1( 2022). https:// doi. org / 10.1051 / jeos / 2022003.
18. Ehrhardt M et al., Transfer of micron pattern with reactive atmospheric plasma jets into fused silica, Appl. Surf. Sci. Adv. 23,( 2024). https:// doi. org / 10.1016 / j. apsadv. 2024.100636.
19. Arnold T, Boehm G, Paetzelt H, New freeform manufacturing chains based on atmospheric plasma jet machining, J. Eur. Opt. Soc.: Rapid Publ. 11, 16002( 2016). https:// doi. org / 10.2971 / jeos. 2016.16002.
20. Vickers hardness test procedure( Web pages, cited 2026 30- 01). https:// www. tec-science. com / material-science / material-testing / vickers-hardness-test /.
21. Diamond cone for Rockwell hardness testing( Web pages, cited 2026 30-01). https:// www. tec-science. com / materialscience / material-testing / rockwell-hardness-test /.
22. Müller H, Arnold T. in Proceedings of the Twelfth European Seminar on Precision Optics Manufacturing, Teisnach( Germany), 2025, edited by G. Fütterer, C. Wünsche, O. W. Fähnle, H. Thieß, A. Haberl( Proc. SPIE), 1378906, https:// doi. org / 10.1117 / 12.3074295.
23. Zakiev, I et al., Glass fracture during micro-scratching, Surfaces 3, 2( 2020). https:// doi. org / 10.3390 / surfaces3020016.