J. Eur. Opt. Society-Rapid Publ. 22, 51( 2026) 509
Figure 13. Comparison of calculated IF and the slope, which is used to experimentally obtain the SSD depth after PJE given for sample Sample # 4.
Furthermore, the results can be used to validate nondestructive methods, such as OCT or laser scanning microscopy where a 3D visualization is obtained but imaging artifacts may lead to a misinterpretation of SSD depth levels.
Finally, the work presented may also be beneficial for evaluating etch results using atmospheric pressure plasma techniques employed in optics manufacturing.
Acknowledgments
The authors thank S. Frank, W. Zhang, D. Thelemann and J. Bliedtner from the University of Applied Sciences in Jena for collaboration in the project and especially providing OCT measurements for this paper. The preparation of SSD affected samples applying conventional manufacturing by Layertec GmbH is highly appreciated.
Funding
The IGF project No. 01IF22724N of the F. O. M. is funded by the Federal Ministry for Economic Affairs and Energy( BMWE) as part of the program for the promotion of industrial joint research( IGF) due to a decision of the German Bundestag.
Conflicts of interest The authors declare that they have no competing interests.
Data availability statement
All data generated or analyzed during this study are included in this published article.
Author contribution statement
HM conducted the PJE experiments and measurements, performed analysis of the results as well as theoretical calculations, and handled the paper documentation. TA offered valuable advice for the interpretation of the data and took extensive care of correction of the manuscript to present the data more clearly. The authors have read and approved the final manuscript.
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