attoPUBLICATIONS brochure_nanopositioning-motion_sensing | Page 17

NGp50
T , / HV , / UHV
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x 15 ; 10 mm
5.8 ° 1 °/ s 0.25 N 3 Ncm
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Options / HL high load version
Environment
/ RT
room temperature
/ HV
high vacuum
/ UHV ultra-high vacuum
Encoder
/ NUM
closed loop control based on an optoelectronic encoder
/ RES
closed loop control based on a resistive encoder