Options |
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environment |
/ RT , / HV , / UHV |
/ RT , / HV , / UHV |
/ RT , / HV , / UHV |
/ RT , / HV , / UHV |
/ RT , / HV , / UHV |
encoder |
/ RES |
/ RES |
/ RES |
/ RES |
--- |
high load |
/ HL (*) |
--- |
--- |
--- |
--- |
Positioning Mode @ Ambient Conditions |
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travel range |
5 mm |
5 mm |
2.5 mm |
3 mm |
2.5 mm |
drive velocity |
3 mm / s |
3 mm / s |
1 mm / s |
1 mm / s |
1 mm / s |
maximum load |
2 N |
1 N |
0.5 N |
0.25 N |
0.1 N |
dynamic drive force |
5 N |
2 N |
1 N |
1 N |
0.2 N |
( high load * 3 N ) |
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Closed Loop Features |
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resolution / RES |
200 nm |
200 nm |
200 nm |
200 nm |
---- |
repeatability / RES |
1-2 μm |
1-2 μm |
1-2 μm |
1-2 μm |
--- |
Options |
Environment |
Encoder |
/ RT |
room temperature |
/ HV |
high vacuum |
/ UHV ultra-high vacuum |