Options
environment
|
/ RT , / HV , / UHV |
/ RT , / HV , / UHV |
/ RT , / HV , / UHV |
/ RT , / HV , / UHV |
encoder
high load
|
/ RES
/ HL (*)
|
/ RES
/ HL (*)
|
/ RES
/ HL (*)
|
/ RES
---
|
Positioning Mode @ Ambient Conditions
travel range
drive velocity
maximum load
dynamic drive force
|
20 mm 3 mm / s 20 N 2 N
(* 20N vertical mounting )
|
15 mm 3 mm / s 20 N 2 N
(* 20N vertical mounting )
|
6 mm 3 mm / s 20 N 2 N |
4.8 mm 3 mm / s 2 N 5 N |
Closed Loop Features
resolution / RES
repeatability / RES
|
200 nm 1-2 μm |
200 nm 1-2 μm |
200 nm 1-2 μm |
200 nm 1-2 μm |
Dimension | |
3x |
positioner series with smallest available footprint |
5x |
positioners designed for a 1 ” clear bore size |
10x |
positioners designed for a 2 ” clear bore size |
3xx |
linear positioners with integrated bearings |