A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 15

Liquid Nanoparticle Sizer (LNS)
High Resolution – Multimodal Measurement
• Individual modes
may be defined
by separate log-
normal
distributions
• Sum of single
distributions fit
to raw data
• Automation for
process coming
for Kanolysis ®
Kanomax FMT Proprietary and
Confidential, slide 15