A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for | Page 14

Liquid Nanoparticle Sizer (LNS)
Competitive Methods
• Current in-situ
methods are
often unable
to resolve
multimodal
distributions
• Concentration
information is
not provided
Kanomax FMT Proprietary and
Confidential, slide 14
Litchy, M. et.al.: Pittcon 2012