WAFER HANDLING AUTOMATION PRODUCT CATALOG | Page 22

Microscope Loaders/Unloaders Custom Automated Microscope Load/Unloaders Programmable Microscope Load/Unloader with Notch/Flat Finder AUTOMATIC WAFER LOADER / UNLOADER GAT-AWM-6800-EX Customization and Features. 1 Customization. Every part of our Microscope loaders can me manipulated to meet your exact need. Call one of our experienced Design Engineers to plan your next product 1.866.6G2.ATEC or (972)479-0699 2 Versatile Options. The options are the most versatile in the industry. From materials to configuration you choose the right materials for the job. 3 High Quality. Fabricated with only the highest quality materials and accessories, our products are sure to last your business a lifetime. Quantity Discounts Available - Lifetime Worksmanship Warranty 22 Lifetime Worksmanship Warranty - Our Success is Built on TOTAL Customer Satisfaction The Automatic Programmable Wafer Microscope Loader (AWM-6800-EX) system extracts a wafer from a predefined location of a 25-wafer cassette and places the wafer on a self-centering chuck for flat/notch alignment. An exchange arm then places the wafer onto a stage under a microscope for inspection, and returns the wafer to the original location upon completion. This operation can be done by using any one of the selected modes of operation outlined in this manual. This machine is designed to contact wafers only on the back side of the wafer with vacuum to secure the wafer movement. MACRO & MICRO INSPECTION The inspection is a three-step operation: Macro & Micro inspection, the arm picks up the wafer & retracts it to “out” home position. Operator can visually inspect the wafer & decide to pass or reject the wafer (Macro Mode). If the wafer is rejected (by clicking the reject button on the screen), then the wafer will be sent back to the cassette. User may also request for flat/notch alignment either in the 3, 6, 9, or 12 o’clock position before transition to microscope. After inspection, the wafer tray arm automatically returns the wafer to it’s original slot. OPERATION MODES The AWM-6800-EX comes with 5 usable modes for specific operations. “Inspect All”, “Manual”, “Random”, “Series”, and “Interval” The standard “Inspect All” will identify and inspect every wafer. “Manual” mode the user must select the wafer to be inspected. In “Random” mode the user chooses the amount of wafers to be inspected while the system randomly selects those wafers to be inspected until the number chosen is met. “Series” mode, the user will choose the specific wafers to be selected and the group of selected wafers will be inspected. Finally in the “Interval” mode the user selects an interval for the wafers to be inpsected along with the starting location. For example, every 2nd or every 3rd wafer starting with X.