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Proudly Made in the USA
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Three Stage Features
Boat Platform
Consists of 3 independent stages. All cassettes and boats are placed on
stages where integrated pressure sensors ensure that boats are properly
aligned prior to wafer transfer. Minimum edge contact is used in lifting
wafers to the retainer head assembly for holding. Once the first boat is
removed the second boat is added and the process is repeated.
Quantity Discounts Available - 2 Year Warranty Parts & Labor
Retainers
The retainer assembly utilizes two 25 slotted retainer arms to secure all 50
wafers and then gently aligned for unloading into a 50 slot Quartz or SiC boat.
The platform recognizes the addition of the SiC adapter prior to the unloading to prevent accidental loading into a cassette.
Quantity Discounts Available - 2 Year Warranty Parts & Labor
Other Options
This system can also accommodate a fixed or automatic platform. The automatic platform allows for the SiC boat to be loaded at the beginning of the process and then automatically shift the platform for unloading. Once complete
the platform returns to its original position for easy pickup.
Features:
PLC Controlled
Minimized Wafer Contact
Preserved Flat Alignment
Hard Black Anodized Frame
Retainer Default Close Position
Vacuum Sensors
Small Footprint
2 - Year Warranty
Customization and Installation available on all G2 Products
Options:
SiC Boat Adapter
High Temperature Vespel
Stainless Steel Covers
Recessed Mounting
Product Specifications and Appearances Are Subject To Change Without Notice
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