DF
D E LTA F DF-730 NanoTrace
SUPPORTING
When your processes need high-purity gas
measurements for oxygen and moisture, DF analyzers
deliver industry-leading performance that reaches down
to the very lowest ultra-trace levels.
Utilizing the exceptional sensing capabilities of
Servomex’s Coulometric and TDL sensing technologies
for the measurement of oxygen and moisture
respectively, DF analyzers are optimized for a sensitive
and stable analysis at ppm, ppb and ppt levels.
Delivered through the DF-500 ultra-trace oxygen
range and DF-700 moisture range, DF products are
the recognized standard for ultra-low measurements
in the semiconductor, specialty gas, industrial gas and
hydrocarbon processing industries.
PROCESS
TUNABLE DIODE LASER (TDL)
TRACE MOISTURE
MEASUREMENTS, SUITABLE
FOR MONITORING ELECTRONIC
GRADE HCI GAS PRODUCTION IN
SEMICONDUCTOR FABS
MONITORING
PRODUCT
HIGH PURITY
MEASURES
GAS
H 2 O
QUALITY
ULTRA TRACE
Designed to analyze moisture contamination
in electronics grade HCl used in semiconductor
fabs, the DF-730 NanoTrace's highly sensitive
performance is ideal for quality control and leak
detection applications, with a fast-response
measurement that is stable, accurate and consistent.
ppb
ULTRA TRACE
ppt
WATER
APPLICATION
ppm
TRACE
TDL sensing provides high stability and minimal
moisture contact with optical elements
Broad detection range: 1ppb – 10ppm
SENSING TECHNOLOGY
High reliability; repeatable baseline
measurements unaffected by loss in
mirror reflectivity
D E LTA F DF-550E NanoTrace
AN ULTRA-TRACE OXYGEN
ANALYZER OPTIMIZED FOR
QUALITY MEASUREMENTS IN
HIGH-PURITY ELECTRONIC GASES
Suitable for use with multiple background gases,
the DF-550E NanoTrace is designed to deliver ultra-
trace measurements of O 2 as a contaminant in
ultra-high-purity electronic gases, and is unaffected
by sample and flow rate changes, delivering
sensitive and dependable process monitoring.
Ultra-trace Coulometric sensing
(200ppt Lower Detection Limit)
Recovers quickly from process upsets
and compensates for sample and flow
rate fluctuations
HIGH PURITY
GAS
O 2
OXYGEN
MEASURES
APPLICATION
ppb
ULTRA TRACE
ppt
QUALITY
ULTRA TRACE
SENSING TECHNOLOGY
D E LTA F DF-560E NanoTrace
Designed to measure ultra-trace oxygen to the very
lowest levels, the flexible and adaptable DF-560E
NanoTrace delivers to the semiconductor sector
an industry-leading 45ppt Lower Detection Limit
and can monitor O 2 in multiple background gases
while logging data in a variety of formats.
HIGH PURITY
GAS
O 2
OXYGEN
MEASURES
APPLICATION
ppm
TRACE
ppb
ULTRA TRACE
QUALITY
ppt
ULTRA TRACE
Industry-leading 45ppt Lower Detection Limit
Flexible portability
Compensates for sample and flow rate
fluctuations and ideal for upset prone applications
P18
FOR THE FULL RANGE OF ANALYZERS VISIT s ervomex.com/gas-analyzers
TUNABLE DIODE LASER (TDL)
TRACE MOISTURE
MEASUREMENTS, SUITABLE FOR
QUALITY CONTROL OF
ELECTRONIC-GRADE AMMONIA
GAS PRODUCTION IN LED PLANTS
HIGH PURITY
MEASURES
GAS
H 2 O
ppb
ULTRA TRACE
ppm
WATER
APPLICATION
QUALITY
TRACE
Designed to monitor trace levels of moisture in
electronics-grade ammonia, the DF-740 NanoTrace
uses industry-leading TDL sensing technology and a
robust, long-path-length Herriott Cell for an exceptionally
broad measurement range of 10ppb to 10ppm.
Various portability options
ULTRA-TRACE COULOMETRIC
OXYGEN MEASUREMENTS
IN ULTRA-HIGH-PURITY
ELECTRONIC GRADE GAS FOR
QUALITY CONTROL
D E LTA F DF-740 NanoTrace
SENSING TECHNOLOGY
Simplified ongoing maintenance requirements
with no consumables required
High reliability; repeatable baseline measurements
unaffected by loss in mirror reflectivity
SENSING TECHNOLOGY
Trace-level TDL sensing provides high stability
and minimal moisture contact with
optical elements
D E LTA F DF-745 NanoTrace
TUNABLE DIODE LASER (TDL)
TRACE/ULTRA-TRACE MOISTURE
MEASUREMENTS FOR ULTRA-
HIGH-PURITY ELECTRONIC GAS
CHECKS IN LED/LCD
MANUFACTURING PROCESSES
Able to monitor multiple background gases, the
DF-745 NanoTrace delivers exceptional performance
and operational flexibility in a compact unit, using
industry-leading TDL sensing technology to offer a
Lower Detection Limit of 2ppb.
Analysis immune to gas cell concentration:
DF-745 operates to specification with up to
90% signal loss
Simplified ongoing maintenance requirements
with no consumables required
High reliability; repeatable baseline
measurements are not affected by a loss in
mirror reflectivity
HIGH PURITY
GAS
MEASURES
H 2 O
WATER
APPLICATION
ppm
TRACE
ppb
ULTRA TRACE
QUALITY
ppt
ULTRA TRACE
SENSING TECHNOLOGY
FOR THE FULL RANGE OF ANALYZERS VISIT s ervomex.com/gas-analyzers
P19
P3