SERVOPRO MonoExact DF310E
OXYGEN ANALYZER
AquaXact 1688
MOISTURE SENSOR
study from pms
DIGITAL
SIMULTANEOUS
ANALYSIS
DUAL MEASUREMENT SOLUTION
FOR OXYGEN AND MOISTURE
This edition of UHP magazine features a guest article by Servomex’s sister company Particle
Measuring Systems (PMS), which we think our UHP readers will find valuable.
Setting the standard for contamination monitoring, PMS specializes in viable and non-
viable particle counters that measure impurity levels in clean, controlled environments.
Like Servomex, it is part of the Spectris Group, a leading supplier of productivity-enhancing
instrumentation and controls. Find out more about PMS at www.pmeasuring.com
THE SERVOPRO MonoExact DF310E AND AquaXact 1688 ARE DESIGNED TO COMBINE
FOR SIMULTANEOUS ANALYSIS
Servomex’s gas analysis expertise means
there’s now a single, combined solution for
the measurement of oxygen and moisture.
The SERVOPRO MonoExact DF310E digital
oxygen analyzer and AquaXact 1688
moisture sensor were developed together
at our US Technical Center to ensure
seamless integration and a simultaneous
dual analysis of oxygen and moisture.
Built around the latest innovations in
software and hardware, the MonoExact
DF310E provides customers with a
choice of accurate, reliable oxygen
measurement technologies.
It offers an updated Coulometric sensor,
for three different parts-per-million (ppm)
ranges, or a non-depleting Paramagnetic
sensor, for percentage measurements.
PPM RANGES
% MEASUREMENTS
NANOPARTICLE MONITORING IN
ULTRA-CLEAN MANUFACTURING
ENVIRONMENTS
The AquaXact 1688 is a fast-response
moisture sensor using stable, sensitive
Aluminum Oxide technology. It measures
dew point from -100 o C to 20 o C, and
ppm moisture.
With industry-leading sensitivity and
stability, the AquaXact is accurate to
within ±3 o C, and offers repeatability
of 0.5 o C for a wide range of gas phase
process applications.
Working together, they provide an ideal
solution for applications that need
simultaneous monitoring of oxygen
and moisture. The NPC10 is a Condensation Particle
Counter (CPC) and is different from
traditional 0.1µm OPCs that are based
solely on optical light scattering.
Connecting the AquaXact to the
MonoExact DF310E is simple: once the
sensor is connected and powered on, the
digital analyzer automatically detects it. The Nano-ID® NPC10 NanoParticle
Counter can detect 10nm particles and
provides a solution for the sub-0.1µm
monitoring gap in manufacturing
process control and yield enhancement
initiatives in the semiconductor and data
storage industries.
This allows control via the color
touchscreen, access to eight alarms
and eight relays, and advanced digital
communication options, including
Ethernet, Modbus TCP/IP and PROFIBUS.
It also makes it easy to replace the
AquaXact’s ultra-thin film sensor tip in
the field, without losing measurement
quality. Simply upload the calibration file
using the USB port on the MonoExact
DF310E, so there’s no need for return-to-
factory calibrations.
TYPICAL DUAL
MEASUREMENT
APPLICATIONS INCLUDE:
• Solder furnace monitoring
• Metals annealing
• Air separation
• Instrument air production
• Glove box purging
FEATURES INCLUDE 8 ALARMS, 8 RELAYS AND ADVANCED DIGITAL COMMUNICATIONS
Get the combined solution for your process and watch the videos today:
servomex.com/medf310evideo servomex.com/aqua1688video
P10
The instrument is suitable for use in
routine production tool monitoring, as
well as during preventive maintenance
and qualification. It is commonly used
for troubleshooting yield problems
related to particulate contamination
and as a complementary monitoring
instrument to traditional portable and
fixed 0.1µm aerosol counters.
The instrument is designed for use in
very clean areas such as ISO Class 1 and
2, does not require any user upkeep, and
operates continuously and unattended.
NPC10 Condensation
Particle Counter (CPC)
P11