DF-500 NanoTrace SERIES
TRACE OXYGEN
SERVOPRO NanoChrome
TRACE GAS
DF-700 SERIES
TRACE MOISTURE
TOTAL UHP
GAS ANALYSIS
SOLUTION
DF-560E NanoTrace
FOR SEMICONDUCTOR
APPLICATIONS
RELIABLE OXYGEN MONITORING IN
UHP ELECTRONIC GRADE GAS
A gas analyzer that provides
performance, stability and reliability is
essential for the measurement of ultra-
trace oxygen as a contaminant for quality
control or leak detection purposes.
With an improved chassis and updated
software providing quieter processing,
the DF-560E monitors ultra-trace O 2 in
multiple background gases, delivering
an industry-best Lower Detection Limit
(LDL) of 45 parts per trillion (ppt).
This ability to make these oxygen
measurements in ultra-high-purity (UHP)
electronic grade gas, using reliable
Coulometric technology, makes the
NanoChrome FOR
SEMICONDUCTORS
GAME-CHANGING SERVOPRO NanoChrome SETS THE STANDARD FOR UHP GAS ANALYSIS
O 2
DF-560E an ideal choice for the
semiconductor industry. operational costs, ensuring cost-effective
set-up and configuration.
Optimized for ease of use and portability,
the DF-560E is perfectly suited to both
semiconductor fabs and analytical carts.
It can be operated from the front panel
or via digital communications options,
with various hand-carry options making
it easy to transport. The sole ongoing maintenance requirement
is an annual span calibration, with no need
for a programmable cell replacement.
The high-stability Coulometric technology
negates the effects of upset-prone
applications while delivering a fast
response in the presence of sample and
flow rate changes. Non-depleting and
factory calibrated, it also reduces
MULTIPLE
GASES
The DF-560E offers comprehensive
automated data logging, with four-day
and 30-day graphical reading records,
and an automatic maintenance log which
records water additions, sensor data and
calibration activity to ensure ISO record-
keeping requirements.
Specifically designed for the semiconductor
manufacturing industry, the high-
performance SERVOPRO NanoChrome
offers reliable, ultra-trace measurements
of ultra-high-purity (UHP) gases in a wide
range of common background gases.
Its innovative, high-sensitivity Plasma
Emission Detector (PED) enables the
monitoring of H 2 , CH 4 , CO, CO 2 and non-
methane hydrocarbon impurities in gases
including He, H 2 , N, Ar and O 2 .
een 10-100
Servomex’s PED sensor is betw
FID measurement,
times more sensitive than a
depending on the carrier gas.
The PED sensing technology and sensitive
ProPeak signal processing software were
both developed by Servomex, providing
the NanoChrome with considerable
advantages over traditional Flame
Ionization Detector and Reduction Gas
Detector technologies in terms of
performance, safety and the ability to
reduce ongoing costs.
In addition, the NanoChrome removes
the need for flammable fuel gas,
delivering an enhanced safety solution.
This also simplifies installation, while the
non-depleting sensor and intelligent
software extends the interval between
calibrations, considerably reducing ongoing
costs across the life of the product.
Advanced signal processing ensures
the highest grade of accuracy,
maximizing process uptime, while
comprehensive digital communications
protocols and access via a network or
web browser facilitate flexible remote
device interaction.
The NanoChrome is an ideal solution for
quality control measurements and
stationary analytical systems in
semiconductor production. When
combined with Servomex’s DF-500 ultra-
trace oxygen and DF-700 moisture series
analyzers, it provides a complete, single-
supplier analysis solution for UHP gas
purity monitoring.
Servomex also offers a DF-550E model,
which measures ultra-trace oxygen
down to 100ppt.
THE DF-500 ANALYZERS OFFER THE LOWEST DETECTION LEVELS AVAILABLE AT 45PPT
THAT'S LIKE FINDING 45 HAIRS
ON ALL THE HEADS
OF EVERY SINGLE PERSON
IN NEW YORK CITY
IN SECONDS
“The DF-560E NanoTrace delivers oxygen measurements to
the very lowest levels, while reducing ongoing costs and
providing operational efficiencies. Along with automated
maintenance and data logging, it’s a no-compromise solution
for any semiconductor application.”
Douglas Barth - Senior Product Manager. Email: [email protected]
To find out more watch the video at servomex.com/df500-video
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“When monitoring UHP gases used in semiconductor wafer
manufacture, the highest sensitivity and performance is essential.
The NanoChrome is a game-changing analyzer that delivers the
best accuracy and selectivity available. It is the standard to which
all other UHP gas monitoring analyzers will be compared.”
Charles Segar - Senior Product Manager. Email: [email protected]
Learn more about game-changing UHP gas analysis at servomex.com/nanochrome
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