D E LTA F DF-745 SGMax
TUNABLE DIODE LASER (TDL)
SENSOR-BASED TRACE MOISTURE
ANALYZER, DESIGNED FOR
MEASURING DIVERSE GAS
MIXTURES IN SPECIALTY GAS
BLENDING APPLICATIONS
HIGH PURITY
GAS MEASURES
H 2 O ULTRA TRACE
WATER ppm
Trace-level TDL sensing provides high-stability
measurements through minimal moisture
contact with optical elements
Integrated LCD display shows real-time
analysis and reference spectrum for increased
user confidence
5ppb Lower Detection Limit lowest available
without need for a pump
Ideal for quality checking of UHP gases used
in LCD and LED manufacture, the compact
DF-749 NanoTrace provides trace and ultra-trace
moisture contaminant measurements in various
background gases including nitrogen, hydrogen,
helium, argon and oxygen.
ppb
SENSING TECHNOLOGY
HIGH PURITY
MEASURES
GAS
H 2 O
ppb
ULTRA TRACE
ppt
WATER
APPLICATION
QUALITY
ULTRA TRACE
ppm
TRACE
Ultra-sensitive Lower Detection Limit of 250ppt
Compact with a low weight; moves easily
from port to port and is ideal for other
mobile applications
SENSING TECHNOLOGY
Trace-level TDL sensing provides high-stability
measurements through minimal moisture
contact with optical elements
D E LTA F DF-750 NanoTrace
TUNABLE DIODE LASER (TDL)
ULTRA-TRACE MOISTURE
MEASUREMENTS FOR
QUALITY CONTROL IN
SEMICONDUCTOR FABS
Designed specifically to make trace and ultra-
trace measurements in a range of ultra-high-
purity gases, the DF-750 NanoTrace is the leading
choice in moisture analysis for the semiconductor
industry, measuring moisture as a contaminant
in electronics grade nitrogen, hydrogen, helium,
argon and oxygen.
Combining the industry-leading properties of
Servomex’s non-depleting Coulometric sensor
and robust Tunable Diode Laser (TDL) technology,
the DF-760E NanoTrace is a compact integrated
solution for monitoring UHP bulk gases used in
the manufacture of integrated circuit boards.
QUALITY
Unique industry solution for ppt monitoring
of moisture and O 2
D E LTA F DF-749 NanoTrace
TUNABLE DIODE LASER (TDL)
SENSOR TRACE/ULTRA-TRACE
MOISTURE MEASUREMENTS FOR
CHECKS OF ULTRA-HIGH-PURITY
ELECTRONIC GASES
HIGH PURITY
GAS
MEASURES
H 2 O
WATER
APPLICATION
ppm
TRACE
ppb
ULTRA TRACE
QUALITY
ppt
ULTRA TRACE
Industry-leading Lower Detection Limits of
100ppt (H 2 O) and 45ppt (O 2 )
Single analyzer can be used for multiple
background gases: N 2 , H 2 , He, Ar and O 2
SERVOPRO
P20
Simplified ongoing maintenance requirements
through the use of non-depleting, high-
stability TDL sensing technology with zero drift
High reliability; repeatable baseline
measurements are not affected by a loss in
mirror reflectivity
FOR THE FULL RANGE OF ANALYZERS VISIT s ervomex.com/gas-analyzers
GAS
MEASURES
APPLICATION
ppb
O 2
ULTRA TRACE
ppt
OXYGEN
QUALITY
ULTRA TRACE
H 2 O
ppm
TRACE
WATER
SENSING TECHNOLOGY
SUPPORTING
The SERVOPRO range makes Servomex’s reliable, stable
and accurate gas measurements available to a diverse
range of safe area applications.
An extensive range of non-depleting Servomex gas sensing
technologies – including Paramagnetic, Zirconium Oxide,
Thermal Conductivity, Plasma and Gas Chromatography
– are integrated into flexible analyzers that either meet
specific measurement requirements, such as for syngas,
hydrocarbons or trace gas mixtures, or provide multi-gas
monitoring capabilities for applications including ASU
production and continuous emissions monitoring (CEMS).
Designed for benchtop use, or mounting in a 19” rack,
all SERVOPRO analyzers feature extensive functionality,
remote communication options and can be operated
directly via intuitive onboard software.
PROCESS
MONITORING
PRODUCT
S E R V O P R O Chroma
SAFE AREA
HIGHLY VERSATILE TRACE GAS
ANALYZER PLATFORM
CONFIGURABLE TO A WIDE
RANGE OF APPLICATIONS
GAS MEASURES
MULTIPLE %
PlasmaHC measurement system requires no
FID for THC measurement
APPLICATION
PERCENT
ppm
Offering a unique, non-depleting plasma emission
detector, the Chroma (K4000) analyzer is one of
the most versatile gas analyzers for trace gas
measurement available. Most applications will be
satisfied by a single 4U rack analyzer configuration,
making the Chroma a compact, cost-effective
solution for continuous process control or
quality monitoring.
Industry-leading 100ppt Lower Detection Limit
HIGH PURITY
UNIQUE DUAL-MEASUREMENT
TRACE/ULTRA-TRACE MOISTURE/
OXYGEN ANALYZER FOR QUALITY
CONTROL OF UHP BULK GASES
APPLICATION
TRACE
This device includes a database of 17 standard
background gases – with blends of up to 8 gases
– providing an adaptable solution for diverse
application needs. Thirty custom gas mixtures can
be predefined directly via the front panel interface.
D E LTA F DF-760E NanoTrace
QUALITY
TRACE
ppb
ULTRA TRACE
PROCESS
CONTROL
SENSING TECHNOLOGY
Fully automated - tune to the application -
system for unique simplicity of use
SENSING TECHNOLOGY
Standalone systems requires no third-party
software or computer to operate
FLAME IONIZATION
DETECTOR
FOR THE FULL RANGE OF ANALYZERS VISIT s ervomex.com/gas-analyzers
P21
P3