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DF-500 NanoTrace SERIES
TRACE OXYGEN
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SERVOPRO NanoChrome TRACE GAS |
DF-700 SERIES TRACE MOISTURE |
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TOTAL UHP
GAS ANALYSIS
SOLUTION
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DF-760E NanoTrace
THE‘ ONE BOX’ SOLUTION FOR TRACE MOISTURE AND OXYGEN
H 2 O
O 2
In the manufacture of integrated circuit boards, the quality control of electronics-grade ultra-high-purity( UHP) gas is vital, requiring a highly sensitive measurement of oxygen and moisture down to the lowest levels.
Servomex’ s DF-760E NanoTrace provides a unique‘ one box’ analyzer solution for the simultaneous monitoring of trace moisture and trace oxygen for the quality control of UHP bulk gases.
The combination of the powerful, industry-leading properties of Servomex’ s non-depleting Coulometric sensor and robust Tunable Diode Laser
( TDL) sensing technology within a single, compact unit makes the DF-760E ideal for the monitoring of those UHP gases used in semiconductor device and circuit board manufacturing.
This dual-sensor approach allows it to measure ultra-low contaminant levels of H 2O and O 2 within background gas blends of N 2, H 2, He, O 2 and Ar. In the case of a background of oxygen, only H 2O can be measured.
It also ensures the DF-760E reduces the footprint, infrastructure and maintenance costs associated with using separate analyzers for moisture and oxygen,
a notable benefit for semiconductor fabs, where space is always at a premium.
Moisture detection comes from the TDL sensor, a simple, durable design that produces a stable reading over time and does not require calibration. A Herriott Cell is used to increase the laser path length, ensuring extremely high sensitivity.
The Coulometric sensor, which is unaffected by reasonable changes in flow rate, and is not consumed when exposed to oxygen, is used for the measurement of O 2. It also reacts very quickly to changing oxygen concentrations.
THE DF-700 ANALYZERS MEASURE MOISTURE AS LOW AS 100PPT
THAT ' S LIKE DETECTING A SINGLE DROP OF WATER IN 10 OLYMPIC-SIZE SWIMMING POOLS
“ With industry-leading Lower Detection Limits( LDL) of 100 parts per trillion( ppt) of H 2 O and 45ppt for oxygen, the DF-760E gives a rapid speed of response, unsurpassed stability, and immunity from trace acid damage. These qualities make it ideal for quality checking and leak detection in semiconductor fab applications.”
Douglas Barth- Senior Product Manager. Email: dbarth @ servomex. com
To see the one-box solution watch the video at servomex. com / df700-video
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