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DF-500 NanoTrace SERIES
TRACE OXYGEN
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SERVOPRO NanoChrome TRACE GAS |
DF-700 SERIES TRACE MOISTURE |
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TOTAL UHP
GAS ANALYSIS
SOLUTION
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DF-760E NanoTrace
THE ‘ ONE BOX ’ SOLUTION FOR TRACE MOISTURE AND OXYGEN
H 2 O
O 2
In the manufacture of integrated circuit boards , the quality control of electronics-grade ultra-high-purity ( UHP ) gas is vital , requiring a highly sensitive measurement of oxygen and moisture down to the lowest levels .
Servomex ’ s DF-760E NanoTrace provides a unique ‘ one box ’ analyzer solution for the simultaneous monitoring of trace moisture and trace oxygen for the quality control of UHP bulk gases .
The combination of the powerful , industry-leading properties of Servomex ’ s non-depleting Coulometric sensor and robust Tunable Diode Laser
( TDL ) sensing technology within a single , compact unit makes the DF-760E ideal for the monitoring of those UHP gases used in semiconductor device and circuit board manufacturing .
This dual-sensor approach allows it to measure ultra-low contaminant levels of H 2O and O 2 within background gas blends of N 2 , H 2 , He , O 2 and Ar . In the case of a background of oxygen , only H 2O can be measured .
It also ensures the DF-760E reduces the footprint , infrastructure and maintenance costs associated with using separate analyzers for moisture and oxygen ,
a notable benefit for semiconductor fabs , where space is always at a premium .
Moisture detection comes from the TDL sensor , a simple , durable design that produces a stable reading over time and does not require calibration . A Herriott Cell is used to increase the laser path length , ensuring extremely high sensitivity .
The Coulometric sensor , which is unaffected by reasonable changes in flow rate , and is not consumed when exposed to oxygen , is used for the measurement of O 2 . It also reacts very quickly to changing oxygen concentrations .
THE DF-700 ANALYZERS MEASURE MOISTURE AS LOW AS 100PPT
THAT ' S LIKE DETECTING A SINGLE DROP OF WATER IN 10 OLYMPIC-SIZE SWIMMING POOLS
“ With industry-leading Lower Detection Limits ( LDL ) of 100 parts per trillion ( ppt ) of H 2 O and 45ppt for oxygen , the DF-760E gives a rapid speed of response , unsurpassed stability , and immunity from trace acid damage . These qualities make it ideal for quality checking and leak detection in semiconductor fab applications .”
Douglas Barth - Senior Product Manager . Email : dbarth @ servomex . com
To see the one-box solution watch the video at servomex . com / df700-video
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