DF-560E NanoTrace FOR SEMICONDUCTOR APPLICATIONS
RELIABLE OXYGEN MONITORING IN UHP ELECTRONIC GRADE GAS
O 2
A gas analyzer that provides performance, stability and reliability is essential for the measurement of ultratrace oxygen as a contaminant for quality control or leak detection purposes.
With an improved chassis and updated software providing quieter processing, the DF-560E monitors ultra-trace O 2 in multiple background gases, delivering an industry-best Lower Detection Limit( LDL) of 45 parts per trillion( ppt).
This ability to make these oxygen measurements in ultra-high-purity( UHP) electronic grade gas, using reliable Coulometric technology, makes the
DF-560E an ideal choice for the semiconductor industry.
Optimized for ease of use and portability, the DF-560E is perfectly suited to both semiconductor fabs and analytical carts. It can be operated from the front panel or via digital communications options, with various hand-carry options making it easy to transport.
The high-stability Coulometric technology negates the effects of upset-prone applications while delivering a fast response in the presence of sample and flow rate changes. Non-depleting and factory calibrated, it also reduces operational costs, ensuring cost-effective set-up and configuration.
The sole ongoing maintenance requirement is an annual span calibration, with no need for a programmable cell replacement.
The DF-560E offers comprehensive automated data logging, with four-day and 30-day graphical reading records, and an automatic maintenance log which records water additions, sensor data and calibration activity to ensure ISO recordkeeping requirements.
Servomex also offers a DF-550E model, which measures ultra-trace oxygen down to 100ppt.
THE DF-500 ANALYZERS OFFER THE LOWEST DETECTION LEVELS AVAILABLE AT 45PPT
THAT ' S LIKE FINDING 45 HAIRS |
ON ALL THE HEADS |
OF EVERY SINGLE PERSON |
|
|
IN NEW YORK CITY |
IN SECONDS
“ The DF-560E NanoTrace delivers oxygen measurements to the very lowest levels, while reducing ongoing costs and providing operational efficiencies. Along with automated maintenance and data logging, it’ s a no-compromise solution for any semiconductor application.”
Douglas Barth- Senior Product Manager. Email: dbarth @ servomex. com
To find out more watch the video at servomex. com / df500-video
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