DF-560E NanoTrace FOR SEMICONDUCTOR APPLICATIONS
RELIABLE OXYGEN MONITORING IN UHP ELECTRONIC GRADE GAS
O 2
A gas analyzer that provides performance , stability and reliability is essential for the measurement of ultratrace oxygen as a contaminant for quality control or leak detection purposes .
With an improved chassis and updated software providing quieter processing , the DF-560E monitors ultra-trace O 2 in multiple background gases , delivering an industry-best Lower Detection Limit ( LDL ) of 45 parts per trillion ( ppt ).
This ability to make these oxygen measurements in ultra-high-purity ( UHP ) electronic grade gas , using reliable Coulometric technology , makes the
DF-560E an ideal choice for the semiconductor industry .
Optimized for ease of use and portability , the DF-560E is perfectly suited to both semiconductor fabs and analytical carts . It can be operated from the front panel or via digital communications options , with various hand-carry options making it easy to transport .
The high-stability Coulometric technology negates the effects of upset-prone applications while delivering a fast response in the presence of sample and flow rate changes . Non-depleting and factory calibrated , it also reduces operational costs , ensuring cost-effective set-up and configuration .
The sole ongoing maintenance requirement is an annual span calibration , with no need for a programmable cell replacement .
The DF-560E offers comprehensive automated data logging , with four-day and 30-day graphical reading records , and an automatic maintenance log which records water additions , sensor data and calibration activity to ensure ISO recordkeeping requirements .
Servomex also offers a DF-550E model , which measures ultra-trace oxygen down to 100ppt .
THE DF-500 ANALYZERS OFFER THE LOWEST DETECTION LEVELS AVAILABLE AT 45PPT
THAT ' S LIKE FINDING 45 HAIRS |
ON ALL THE HEADS |
OF EVERY SINGLE PERSON |
|
|
IN NEW YORK CITY |
IN SECONDS
“ The DF-560E NanoTrace delivers oxygen measurements to the very lowest levels , while reducing ongoing costs and providing operational efficiencies . Along with automated maintenance and data logging , it ’ s a no-compromise solution for any semiconductor application .”
Douglas Barth - Senior Product Manager . Email : dbarth @ servomex . com
To find out more watch the video at servomex . com / df500-video
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