NANO-PROX - Nano-Scale Protective Oxide Films for
Semiconductor Applications & Beyond
ABSTRACT
Mechanical Engineering
Conventional demands for development in semiconductor industry are changing as the Moore’s Law approaching to its
limits. Continuous decrease in the size of the transistors is coming close to atomic levels creating a fundamental barrier
for further process developments as the semiconductor manufacturing is established today . Growth of thin films and
inherent stress development within the film and film/substrate interface are critical for multiple phases of microelectronics
manufacturing. Particularly, protective oxides of metal films are foreseen to have wide applications as (i) an interfacial layer
to improve the adhesion and/or limit penetration of reactive chemicals of a deposited film (ii) as a subtractive layer to achieve
selective material removal and (iii) as a nanofilm with inherent self growth limiting capability that could be used for nanoscale
electronics manufacturing. Fundamental understanding of the proposed research is expected to be utilized in many other
fields such as in biological systems to improve corrosion on bio-implants and, applications in which the interface and thin
film properties affect permeation of reactive chemicals such as fusion reactor design or as ferroelectric capacitors where
hydrogen permeation detoriates device functionality.
Dr. Basim, the Principal Investigator of this study has been actively involved in semiconductor research and development
for more than ten years at major semiconductor companies in US. Her expertise is on integration of newly adapted
semiconductor processes, defect reduction during manufacturing and chemical and mechanical interactions on thin films.
She will initiate her research at Ozyegin University, Mechanical Engineering Department with the support of the IRG funds if
awarded. Dr. Basim’s new appointment at Ozyegin University is expected to bring all these expertise and experience to E.U.
to promote the ongoing research and development.
Yrd. Doç. Dr.
Gül Bahar Basım Doğan
DEPARTMENT
Mechanical Engineering
CONTACT
[email protected]
FUNDING SCHEME
EC - Marie Curie International
Reintegration Grants
2010 International Grants
START DATE
01.04.2010
DURATION
48 months
OZU BUDGET
100.000,00 EUR
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