SERVOPRO NanoChrome
SAFE AREA
SUB-PPB TRACE MEASUREMENT OF H 2 , CH 4 , CO , CO 2 , N 2 , Ar AND NMHC FOR THE SEMICONDUCTOR INDUSTRY
Incorporating the latest advances in gas sensing technology and signal processing methodology , the NanoChrome revolutionizes ultra-trace purity measurements for the semiconductor industry .
FEATURES AND BENEFITS
In compliance with Low Voltage , EMC and applicable Directives
New Plasma Emission Detector ( PED ) Sensor technology enables sub-ppb measurements of
H2 , CH4 , CO , CO2 , N2 , Ar and NMHC
Enables unique total Servomex solution for UHP gas analysis
APPLICATIONS
Semiconductor production – quality control measurements
Semiconductor production – stationary analytical systems
UHP gas production – quality control measurements
GAS MEASURES APPLICATION
MULTIPLE
ULTRA TRACE PPB
ULTRA TRACE PPT
SENSING TECHNOLOGY
QUALITY
SERVOPRO DF-500 Range
SAFE AREA
LEADING ULTRA-TRACE PPT O 2 ANALYZER RANGE
Verified by independent experts as measuring
O2 to the lowest ppt levels available , the DF-500 analyzer range delivers the premium performance in ultra-trace O2 measurement . Consisting of the DF-550E NanoTrace and DF-560E NanoTrace II , the NanoTrace series delivers exceptional O2 measurements at trace and ultra-trace ppt levels .
FEATURES AND BENEFITS
The industry standard for the reliable measurement of O2 in semiconductor manufacture
Fast response and quick upset recovery ensures ultimate performance
Options include flexible configurations hand-carry portable option and on-board calibration systems
APPLICATIONS
Continuous quality control monitoring
Inert gases control checks for electronics grade gases
Post purifier quality certification Leak detection for electronics grade gases
GAS MEASURES APPLICATION
OXYGEN TRACE PPM QUALITY
ULTRA TRACE PPB
ULTRA TRACE PPT
SENSING TECHNOLOGY
SERVOPRO DF-700 Range
SAFE AREA
TUNABLE DIODE LASER ( TDL ) TRACE MOISTURE ANALYZER RANGE
A sophisticated process moisture analyzer range which offers users the comprehensive solution for trace and ultra-trace moisture measurement , the DF-700 series combines the latest TDL Absorption Spectroscopy technology , a robust measuring cell and a true baseline reference for highly accurate moisture measurement .
FEATURES AND BENEFITS
Exceptional range from 100ppt to 20ppm moisture level readings depending on the model
Only true Laser Absorption Spectroscopy technology in the market space which is unaffected by gas contaminants that plague CRDS laser systems
TDLAS line lock technology keeps the laser on the moisture peak centroid measuring the entirety of the moisture ' s mass under the Voigt curve
APPLICATIONS
730 : Quality control of HCl gas 740 : Analysis of electronics-grade NH3 specialty gas 745 : Inert gases leak detection for LED and LCD plants 745 SGMax : Specialty gas cylinder quality control 749 : HP bulk gases used in semiconductor applications 750 : Bulk UHP gas CQC for semiconductor fabs 760E : O2 and H2O monitoring in UHP bulk gases used in semiconductor applications
GAS MEASURES APPLICATION
WATER TRACE PPM QUALITY
ULTRA TRACE PPB
ULTRA TRACE PPT
SENSING TECHNOLOGY
P12