PLASMA
KEY APPLICATIONS
• Semiconductors
• Medical gases
• Air separation units
KEY BENEFITS
• Safer and more stable than competing technologies
• Reliable , gas-specific selectivity
• No sensor maintenance requirements
IDEAL FOR
Safe , stable trace-level analysis of hydrocarbons as impurities in Pure Gas ( P-Gas ) for semiconductor fabs .
WORKS WITH
Gas Chromatography technology to deliver measurements down to ppb levels .
LIMITATIONS
The sensitivity of the Plasma measurement means it is only suitable for trace analysis applications .
USED IN
SERVOPRO Chroma SERVOPRO NanoChrome
SERVOPRO Plasma
P89