LASER MOISTURE
SIMPLE , SENSITIVE MOISTURE ANALYSIS
This moisture analysis technology uses Tunable Diode Laser ( TDL ) spectroscopy to measure trace moisture in pure gases . It has a simple , robust design , using a single laser source and single detector to measure the sample and reference gases .
TDL has advantages over other measurement techniques , as the moisture sample comes only into contact with a few optical components made from very robust materials . It works according to the fundamental principle of Beer ’ s law ; therefore the reading is stable over time and never requires calibration .
To provide a more sensitive measurement , our sensors use a Herriott cell to reflect the laser back and forth numerous times , using mirrors inside the measuring cell . This increases the laser path length , achieving extremely high sensitivity .
TDL moisture sensing delivers exceptional performance capable of measuring down to industryleading sub-ppb levels , driftfree operation , high accuracy and low maintenance . This is achieved through self-correcting optics and laser line locking onto the water peak , removing all possibility of significant drift .
SEMICONDUCTOR MANUFACTURE RELIES ON ULTRA-HIGH-PURITY GASES
P84