Servomex Gas Guide 2022 | Page 32

P & S APPLICATION

ULTRA-HIGH PURITY GASES AND SEMICONDUCTORS

Ultra-high purity ( UHP ) gases are essential for semiconductor manufacturing and the production of electronics such as LED and LCD displays .
Manufacturing the silicon wafers needed for semiconductor applications requires the use of ultra-pure gases . Even the smallest impurities can cause major defects in a wafer , leading to costly scrap and waste .
Multiple gas purification techniques and other strict procedures are used to ensure that UHP gases are delivered to the manufacturing process .
This requires accurate gas monitoring at very low levels of concentration .
Quality control gas measurements must cover all the impurities present . A comprehensive solution is required , but this can lead to integration issues between hardware and software from different sources .
SERVOPRO DF-560E NanoTrace ULTRA
SERVOPRO DF-750 NanoTrace ULTRA
SERVOPRO NanoChrome ULTRA
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