SERVOPRO NanoChrome ULTRA
SAFE AREA
THE NUMBER ONE CHOICE FOR ULTRA-TRACE PURITY MEASUREMENTS IN THE SEMICONDUCTOR INDUSTRY
Delivering superior ultra-trace measurements of UHP gases in a wide range of background gases , the revolutionary NanoChrome ULTRA incorporates the latest advances in sensing and signal processing methodology , for exceptional performance .
FEATURES AND BENEFITS
Innovative high-sensitivity Plasma Emission Detector ( PED ) enables ultra-trace measurements of Ar , N2 , H2 , CH2 , CO , CO2 and NMHC
ProPeak peak detection technique enables unprecedented measurement sensitivity
A complete stand-alone UHP gas analysis solution when combined with DF-500 and DF-700 analyzers
APPLICATIONS
Semiconductor production – quality control measurements
Semiconductor production – stationary analytical systems
UHP gas production – quality control measurements
GAS MEASURES APPLICATION
MULTIPLE
ULTRA TRACE PPB
ULTRA TRACE PPT
SENSING TECHNOLOGY
QUALITY
SERVOPRO DF-560E NanoTrace ULTRA
SAFE AREA
MEASURES ULTRA-TRACE O2 TO THE LOWEST LEVELS
Designed to measure ultra-trace O2 to the ultra-low ppt levels demanded by the semiconductor sector , the DF-560E ULTRA delivers an industry-leading 45ppt LDL . Once the analyzer is measuring below 1 ppb , the units automatically convert to ppt for better resolution of the smallest of concentration movements .
FEATURES AND BENEFITS
Lowest level O2 detection available to the semiconductor industry
Automated maintenance performs zero and span calibrations on a scheduled basis
Fast response and quick upset recovery ensures highly stable operation
APPLICATIONS
Continuous quality control monitoring
Inert gases control checks for electronics grade gases
Post-purifier quality certification Leak detection for electronics-grade gases
GAS MEASURES APPLICATION
OXYGEN TRACE PPM QUALITY
ULTRA TRACE PPB
ULTRA TRACE PPT
SENSING TECHNOLOGY
SERVOPRO DF-750 NanoTrace ULTRA
SAFE AREA
THE FIRST CHOICE IN MOISTURE ANALYSIS FOR THE SEMICONDUCTOR INDUSTRY
A TDL-based trace / ultra-trace analyzer , the DF-750 ULTRA delivers industry-best measurements of moisture as a contaminant in the UHP gases used in 300mm semiconductor fabs , with a LDL of 55ppt .
FEATURES AND BENEFITS
Exceptional 55ppt LDL delivers the sensitivity and precision demanded by semiconductor makers
Water contact with optical components is minimized for optimum reliability
Storage and recall function for archiving of operational history
APPLICATIONS
Continuous quality control of bulk UHP gases for semiconductor fabs
GAS MEASURES APPLICATION
WATER TRACE PPM QUALITY
ULTRA TRACE PPB
ULTRA TRACE PPT
SENSING TECHNOLOGY
P105