Purity & Specialty (Semicon) Issue 02 | Page 8

PRODUCT FOCUS MEET MOISTURE CHALLENGES WITH THE HIGHLY STABLE DF-745 ULTRA-TRACE GAS ANALYSIS WITH SERVOPRO NanoChrome PROPEAK FILTERING Designed for trace and ultra-trace moisture contaminant measurements for LED/LCD manufacturing processes, the DF-745 delivers exceptional operational flexibility in a compact unit. Ideal for ultra- high-purity (UHP) electronic gas checks, the robust analyzer can be moved easily from port to port, virtually eliminating the dry-down times often associated with these applications. HIGHLY SENSITIVE, SELECTIVE AND RELIABLE MEASUREMENTS PED SENSOR BETTER PERFORMANCE, SAFETY, STABILITY AND ONGOING COSTS Using industry-leading Tunable Diode Laser (TDL) sensing technology housed in a Herriott cell, the DF-745 has a Lower Detection Limit of just 1 part per billion, and a broad detection range from 0-20 parts per million. The Herriott gas cell is virtually immune from mechanical disturbances in the field, prevents loss in mirror reflectivity, and minimizes moisture contact with optical components, ensuring an accurate measurement. Factory pre-calibrated for quick, easy installation, the DF-745 fits 1 PPB ULTRA-TRACE DETECTION LIMIT ZERO DRIFT PROVIDED BY THE STABLE MEASUREMENT OF TDL SENSING REDUCED CALIBRATION ULTRA-RELIABLE BASELINE WITH A FAST SPEED OF RESPONSE P08 1 PPB ULTRA-TRACE DETECTION LIMIT The measurement stability provided by TDL technology ensures the analyzer shows zero drift – reducing calibration requirements – and recovers quickly from upset prone applications. It also means that the ultra-reliable baseline measurements are provided with a fast speed of response. A high-performance analyzer specifically designed for the semiconductor manufacturing industry, the SERVOPRO NanoChrome offers reliable ultra-trace measurements of impurities in electronic gases. 19” rack mount systems and offers RS232 or RS485 serial communications. The DF-745 delivers the high accuracy and ultra-low detection limits required. Modern LCD and LED manufacturing processes rely on ultra-trace quality measurements for moisture contaminants in UHP electronics grade gases. Providing results in multiple background gases, it actively reduces ongoing costs and offers a long, cost-effective lifetime of ownership, without compromising on performance. The NanoChrome is a comprehensive solution for ultra-trace measurements of hydrogen, methane, carbon monoxide, carbon dioxide, nitrogen, argon and non- methane hydrocarbon compounds in a wide range of common background gases. THE DF-745 SGMax Servomex also offers this specialized DF-745 model for measurements of single and multi-gas specialty gas blends. Using intelligent, integrated software, it includes a database of 17 standard background gases and blends of up to eight gases, and is configurable for 30 custom gas mixtures. With the same reliable, stable TDL technology as the standard DF-745, the SGMax has a broad measurement range of 0-100ppm, with a LDL of 5ppb – the lowest available without using a pump. Watch our product video online: servomex.expert/ video-df700series At its heart is the Plasma Emission Detector (PED) sensor, which offers significant advantages over traditional Flame The NanoChrome can be combined with the DF-500 ultra-trace oxygen analyzer range and DF-700 moisture analyzer range for a comprehensive, reliable UHP gas analysis solution for the semiconductor industry, all from a single supplier. See pages 10 & 11 to learn more. Emission Detector (FID) and Reduction Gas Detection (RGD) sensing technologies. Using a Direct Analysis Methodology, the NanoChrome removes the doubt associated with FID and RGD measurements, and has benefits for performance, safety, stability and ongoing costs. Advanced signal recovery, using Servomex’s patented ProPeak filtering, delivers highly sensitive, selective and reliable measurements. Neither a methanizer nor a flammable fuel gas are required, so there are appreciable cost benefits for the customer. General Gas (G-Gas) used in a semiconductor fab before the main purifier, requires a Lower Detection Limit (LDL) of around 10 parts per billion (ppb), which can be achieved with a FID sensor. However, the Pure Gas (P-Gas) used after the purifier stage has much more demanding requirements, with a LDL of 1ppb or less. The NanoChrome offers the most stable P-Gas analysis on the market, delivering a sub-ppb measurement of the contaminant gases and hydrocarbons that can be present at ultra-trace levels in semiconductor manufacture. Watch our product video online: servomex.expert/ video-nanochrome P09