PRODUCT FOCUS
MEET MOISTURE CHALLENGES
WITH THE HIGHLY STABLE DF-745
ULTRA-TRACE GAS ANALYSIS
WITH SERVOPRO NanoChrome
PROPEAK FILTERING
Designed for trace and ultra-trace
moisture contaminant measurements for
LED/LCD manufacturing processes, the
DF-745 delivers exceptional operational
flexibility in a compact unit. Ideal for ultra-
high-purity (UHP) electronic gas checks,
the robust analyzer can be moved easily
from port to port, virtually eliminating
the dry-down times often associated with
these applications.
HIGHLY SENSITIVE, SELECTIVE
AND RELIABLE MEASUREMENTS
PED SENSOR
BETTER PERFORMANCE, SAFETY,
STABILITY AND ONGOING COSTS
Using industry-leading Tunable Diode
Laser (TDL) sensing technology housed
in a Herriott cell, the DF-745 has a Lower
Detection Limit of just 1 part per billion,
and a broad detection range from 0-20
parts per million.
The Herriott gas cell is virtually immune
from mechanical disturbances in the
field, prevents loss in mirror reflectivity,
and minimizes moisture contact with
optical components, ensuring an accurate
measurement. Factory pre-calibrated for
quick, easy installation, the DF-745 fits
1 PPB
ULTRA-TRACE DETECTION LIMIT
ZERO DRIFT
PROVIDED BY THE STABLE
MEASUREMENT OF TDL SENSING
REDUCED CALIBRATION
ULTRA-RELIABLE BASELINE WITH
A FAST SPEED OF RESPONSE
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1 PPB
ULTRA-TRACE DETECTION LIMIT
The measurement stability provided by
TDL technology ensures the analyzer
shows zero drift – reducing calibration
requirements – and recovers quickly from
upset prone applications. It also means that
the ultra-reliable baseline measurements
are provided with a fast speed of response. A high-performance analyzer specifically
designed for the semiconductor
manufacturing industry, the SERVOPRO
NanoChrome offers reliable ultra-trace
measurements of impurities in
electronic gases.
19” rack mount systems and offers RS232
or RS485 serial communications. The DF-745 delivers the high accuracy and
ultra-low detection limits required. Modern LCD and LED manufacturing
processes rely on ultra-trace quality
measurements for moisture contaminants
in UHP electronics grade gases. Providing results in multiple background
gases, it actively reduces ongoing costs
and offers a long, cost-effective lifetime
of ownership, without compromising
on performance. The NanoChrome is a comprehensive
solution for ultra-trace measurements of
hydrogen, methane, carbon monoxide,
carbon dioxide, nitrogen, argon and non-
methane hydrocarbon compounds in a
wide range of common background gases.
THE DF-745 SGMax
Servomex also offers this specialized
DF-745 model for measurements of
single and multi-gas specialty gas blends.
Using intelligent, integrated software,
it includes a database of 17 standard
background gases and blends of up to
eight gases, and is configurable for 30
custom gas mixtures.
With the same reliable, stable TDL
technology as the standard DF-745, the
SGMax has a broad measurement range
of 0-100ppm, with a LDL of 5ppb – the
lowest available without using a pump.
Watch our product
video online:
servomex.expert/
video-df700series
At its heart is the Plasma Emission Detector
(PED) sensor, which offers significant
advantages over traditional Flame
The NanoChrome can
be combined with
the DF-500 ultra-trace
oxygen analyzer range
and DF-700 moisture
analyzer range for a
comprehensive, reliable
UHP gas analysis solution
for the semiconductor
industry, all from a
single supplier.
See pages 10 & 11
to learn more.
Emission Detector (FID) and Reduction Gas
Detection (RGD) sensing technologies.
Using a Direct Analysis Methodology, the
NanoChrome removes the doubt associated
with FID and RGD measurements, and has
benefits for performance, safety, stability
and ongoing costs.
Advanced signal recovery, using
Servomex’s patented ProPeak filtering,
delivers highly sensitive, selective and
reliable measurements.
Neither a methanizer nor a flammable fuel
gas are required, so there are appreciable
cost benefits for the customer.
General Gas (G-Gas) used in a
semiconductor fab before the main
purifier, requires a Lower Detection Limit
(LDL) of around 10 parts per billion (ppb),
which can be achieved with a FID sensor.
However, the Pure Gas (P-Gas) used
after the purifier stage has much more
demanding requirements, with a LDL of
1ppb or less.
The NanoChrome offers the most
stable P-Gas analysis on the market,
delivering a sub-ppb measurement of
the contaminant gases and hydrocarbons
that can be present at ultra-trace levels in
semiconductor manufacture.
Watch our product
video online:
servomex.expert/
video-nanochrome
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