PROCESS STUDY
SEMICONDUCTOR MANUFACTURE
KEY
APPLICATION TYPES:
PRE-PURIFIER
1 BULK GAS SUPPLY
ASU TUBE TRAILER
QUALITY
PROCESS CONTROL
POST-PURIFIER
2
BULK TANKS
BULK PURIFIERS
3
STATIONARY ANALYTICAL
MOBILE ANALYTICAL
MonoExact
PROCESS GASES TO
MANUFACTURING
1. PRE-PURIFIER BULK GAS SUPPLY
2. POST-PURIFIER
MonoExact
DF310E DF310E
DF-500 SERIES DF-500 SERIES
DF-700 SERIES DF-700 SERIES
NanoChrome NanoChrome
Chroma Chroma
3. MOBILE ANALYTICAL CARTS
Widely utilized at most wafer manufacturing locations, mobile
analytical carts are used for multiple purposes to ensure the
quality of specific gas line installations.
Gases are supplied to the semiconductor customer from one of a
variety of industrial gas suppliers. They are supplied in multiple
forms, including from an on-site Air Separation Unit (ASU), bulk
tube trailers, and bulk tanks. Bulk gases are sent through various gas purification techniques.
These include bulk (house) purifiers that purify large flows of gas as
they enter the building, or point-of-use (POU) purifiers that purify
smaller quantities of gas before they enter the process equipment. These gases are designed to meet a specific purity grade from the
industrial gas supplier, but are typically monitored at their point
of production or entry into the facility. Many leading semiconductor companies employ both bulk and
POU purifiers to ensure that they have the purest gases prior to
entering the process environment. Each new gas line installed in a semiconductor plant must be
“qualified” prior to being used in production. This qualification
process includes testing of various parameters of the new gas
line, including impurity analysis.
A full set of analyzers can typically be found at the ASU location
in a control room, operated by the industrial gas company. Some
semiconductor end-users may also require a rack of analyzers to
be installed at the point of use for the tube trailers or bulk tanks. Stationary analytical systems are installed at multiple locations
in a large wafer manufacturing environment. They will typically
contain multiple analyzers for each bulk process gas. A semiconductor plant may have multiple mobile analytical carts
so multiple new gas lines and/or process gases can be
monitored simultaneously.
It is common to have 10-20 analyzers installed in each stationary
analytical system to monitor the bulk gases post-purifier. Each
stationary analytical system is integrated and digitally connected
to the building management system to collect and trend gas
purity data. In addition, mobile analytical carts are used in lieu of stationary
analytical systems during maintenance activities, as the process
gas impurities must always be monitored.
P14
SAFETY
APPLICATION MEASUREMENT SOLUTIONS
ASU KEY ANALYZERS
Quality control, process control
and safety applications:
SEMICONDUCTOR
FABRICATION ANALYZERS
Quality control for bulk gases:
• SERVOPRO MonoExact
DF310E for O 2 • MonoExact DF310E for
O 2 impurities
• SERVOPRO MultiExact 4100
for multi-gas analysis • DF-550E or DF-560E for
O 2 impurities
• SERVOPRO Plasma for N 2 • DF-745, DF-749 or DF-750 for
moisture impurities
• SERVOPRO Chroma for
multi-gas analysis
• SERVOPRO FID
for hydrocarbons
• AquaXact 1688 for moisture
• DF-760E for O 2 and
moisture impurities
• NanoChrome for other
impurities such as CH 4 , NMHC,
CO, CO 2 , organics, etc.
P15