A SINGLE-SUPPLIER SOLUTION
FOR UHP GAS ANALYSIS
THE SERVOMEX UHP SOLUTION
DF-500 Series DF-700 Series SERVOPRO NanoChrome
The DF-500 series Coulometric analyzers
deliver industry-leading, ultra-trace
oxygen measurements at parts-per-trillion
(ppt) levels. The DF-550 offers a lower
detection limit (LDL) of 200 ppt, while
the DF-560 has the lowest available LDL
at 45ppt. The DF-700 series provides the lowest
LDLs for moisture, using Tunable Diode
Laser sensing technology to reach an LDL
of 100ppt. Configured to suit a range of
applications, seven models are available
in the range, including the DF-760E
combined oxygen and moisture analyzer. The SERVOPRO NanoChrome analyzer
provides sub-parts-per-billion
measurements for a range of ultra-trace
impurities. Its innovative Plasma Emission
Detector (PED) sensing technology does
not require the use of flammable gas,
delivering a safe, stable measurement.
Non-depleting,
factory-calibrated sensor Broad detection range for
ultra-trace measurements Sensitive, non-depleting
PED sensor
Negates effects of
upset-prone applications Laser sensor is unaffected
by gas contaminants Patented ProPeak
filtering software
Monitors multiple
background gases Line lock system for
reliability and high accuracy Highly reliable,
ultra-trace measurements
INTUITIVE GAS SOFTWARE
FIXED RACK SYSTEM
Ultra-high-purity (UHP) gases play an
essential role in semiconductor
wafer fabrication.
Microscopic and sub-microscopic
particulates, and vapor phase impurities
below 100 parts per trillion by volume
(pptv), can disrupt and react within the
fabrication processes, creating wafer
defects and leading to costly scrap and
waste product.
A high-purity, electronic-grade substrate
(usually silicon) must be between 9N and
11N (99.9999999% to 99.999999999%)
purity. For example, 9N purity silicon
can only have a impurities totaling one
part per billion (ppb) at most. To ensure
gases remain free of contamination,
semiconductor manufacturers employ
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PORTABLE CART SYSTEM
many resources, including strict gas
supplier specifications, multiple gas
purification techniques, real-time
continuous gas purity monitoring,
and post-process inspection, all aimed
at delivering ultra-pure gases to the
manufacturing process.
Servomex provides an integrated, reliable
solution for these UHP gas analysis
measurements, seamlessly combining
industry-leading technology into a
comprehensive system that reaches the
lowest available detection limits.
The DF-500 and DF-700 series of
analyzers provide accurate, ultra-trace
oxygen and moisture measurements,
while the remaining impurities can be
monitored by the versatile, reliable
INTUITIVE GAS SOFTWARE
SERVOPRO NanoChrome. These analyzers
can be easily integrated into a fixed rack or
portable cart system, providing a modular,
scalable Continuous Quality Control
infrastructure for gas distribution systems.
Servomex’s Intuitive Gas Software
(IGS) provides full control, creating a
unique, single-supplier solution that can
continuously monitor process gases prior
to entering the wafer manufacturing
process, measuring every impurity present.
Fully supported by Servomex’s global
Service Network, this measurement and
monitoring system delivers a complete,
high-performance, cost-effective solution
for UHP gas analysis.
Servomex offers an expertly designed
holistic systems solution for the analysis
and quality control of UHP gases. The
brain of this system is the Intuitive Gas
Software (IGS), a modular Windows
10-based package enabling real-time
monitoring and reporting.
Developed to meet
customer requirements
Can monitor a process
continuously or on demand
Allows multiple operators
to log in at the same time
Watch our new total UHP solution video to learn more:
servomex.expert/video-totaluhp
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