SERVOPRO NanoTrace DF-560E ULTRA
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Measures ultra-trace O 2 to the lowest levels
Designed to measure ultra-trace O2 to the ultra-low ppt levels demanded by the semiconductor sector, the DF-560E ULTRA delivers an industry-leading 45ppt lower detection limit.
Features and benefits
Lowest level O2 real-time detection available to the semiconductor industry
Automated maintenance performs zero and span calibrations on a scheduled basis
Fast response and quick upset recovery ensures highly stable operation
Gas |
Measures |
Application |
Oxygen |
Trace ppm Ultra-trace ppb Ultra-trace ppt |
Quality |
Applications
Continuous quality control monitoring
Inert gases control checks for electronics grade gases
Post-purifier quality certification Leak detection for electronics-grade gases
Coulometric
SENSING TECHNOLOGY
SERVOPRO NanoTrace DF-750 ULTRA
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The first choice in moisture analysis for the semiconductor industry
A Tunable Diode Laser Absorption Spectroscopy-based trace / ultra-trace analyzer, the DF-750 ULTRA delivers an industry-leading lower detection limit( LDL) of 55ppt for process measurements of moisture in the UHP gases used in advanced semiconductor fabs. Using the new DF-700 Gen 7 digital electronics, it offers improved serviceability and field replacement for key components.
Features and benefits
Exceptional 55ppt LDL delivers the sensitivity and precision demanded by semiconductor makers
Applications
Continuous quality control of bulk UHP gases for semiconductor fabs
Gas |
Measures |
Application |
Moisture |
Ppm Trace ppb Ultra-trace ppt |
Quality |
SENSING TECHNOLOGY |
Laser Moisture |
SERVOPRO NanoTrace DF-760E ULTRA
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Market-leading dual analysis of O 2 and moisture
Delivering an industry-leading lower detection limit( LDL) of 55ppt for moisture and 45ppt O2 in the UHP gases used in advanced semiconductor fabs, the new DF-760E ULTRA Gen-7 is designed for manufacturability and repairability. A completely new digital electronic package offers enhanced field serviceability and parts replacement.
Features and benefits
Industry-leading LDLs of 45ppt O2 and 55ppt moisture measurement in one unit
Non-depleting O2 and moisture sensing technologies reduce cost of ownership
Applications
Monitoring O2 and moisture as contaminants in UHP bulk gases used in semiconductor applications
Gas |
Measures |
Application |
Moisture Oxygen |
ppm Trace ppb |
Quality |
|
Ultra-trace ppt |
|
SENSING TECHNOLOGY
Laser Moisture Coulometric
P16