SERVOPRO NanoTrace DF-550E
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Leading ultra-trace ppt O 2 analyzer range
The new Gen-7 DF-500 delivers ultra-trace
O2 measurement for ultra-high purity applications with improved user interface, software, and diagnostic functionality. The Gen-7 uses the same industry-leading coulometric O2 sensor to measure O2 down to the lowest ppt levels available. Consisting of the NanoTrace DF-550E and NanoTrace DF-560E ULTRA, the NanoTrace series delivers exceptional O2 measurements at trace and ultra-trace ppt levels.
Features and benefits
The industry standard for the reliable measurement of O2 in semiconductor manufacture
Fast response and quick upset recovery ensures ultimate performance
Options include flexible configurations hand-carry portable option and on-board calibration systems
Applications
Continuous quality control monitoring
Inert gases control checks for electronics grade gases
Post-purifier quality certification Leak detection for electronics-grade gases
Gas |
Measures |
Application |
Oxygen |
Trace ppm Ultra-trace ppb Ultra-trace ppt |
Quality |
SENSING TECHNOLOGY |
Coulometric |
SERVOPRO DF-700 series
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Tunable diode laser absorption spectroscopy trace moisture analyzer range
The new DF-700 Series Gen-7 is a sophisticated trace and ultra-trace moisture analyzer range combining new digital electronics with proven sensing technology. Designed for manufacturability and repairability, it allows for field serviceability with many components able to be replaced in the field.
Features and benefits
Exceptional range from 100ppt to 20ppm moisture level readings depending on the model
New solid-state hard drive and CPU, including storage and recall function for archiving of operational history
Designed with field service in mind: laser cell, SSD, CPU, PCBs, display, filter, and gas panel all easily replaced in situ
Applications
745: Inert gases leak detection for LED and LCD plants
745 SGMax: Specialty gas cylinder quality control
749: HP bulk gases used in semiconductor applications
750: Bulk UHP gas CQC for semiconductor fabs
760: O2 and H2O monitoring in UHP bulk gases used in semiconductor applications
Gas |
Measures |
Application |
Moisture |
ppm Trace ppb Ultra-trace ppt |
Quality |
SENSING TECHNOLOGY |
Laser Moisture |
SERVOPRO NanoChrome ULTRA
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The number one choice for ultra-trace purity measurements in the semiconductor industry
Delivering superior ultra-trace measurements of UHP gases in a wide range of background gases, the revolutionary NanoChrome ULTRA incorporates the latest advances in sensing and signal processing methodology, for exceptional performance.
Features and benefits
Innovative high-sensitivity Plasma Emission Detector( PED) enables ultra-trace measurements of Ar, N2, H2, CH4, CO,
CO2 and NMHC
ProPeak peak detection technique enables unprecedented measurement sensitivity
A complete stand-alone UHP gas analysis solution when combined with DF-500 and DF-700 analyzers
Gas |
Measures |
Application |
Multiple |
Ultra-trace ppb Ultra-trace ppt |
Quality |
SENSING TECHNOLOGY |
Applications
Semiconductor production – quality control measurements
Semiconductor production – stationary analytical systems
UHP gas production – quality control measurements
Gas Chromatography Plasma
P15