MEASUREMENT AND MONITORING
Fiber Optic Temperature Monitoring for Semiconductor Production Processes
Advanced Energy is a specialist in semiconductor manufacturing solutions , offering highly accurate power delivery , frequency tuning , and multi-level pulsing solutions for advanced plasma control in critical etching , deposition , inspection , implantation , and annealing processes .
Optimizing yield and throughput requires highly accurate temperature measurement and control . Fiber optic based FOT technologies are becoming increasingly important .
AE ’ s Luxtron range of fiber optic thermography technologies that have been designed to support precise process control for customer innovations . Leveraging fiber optic probes with phosphor sensor technology , Luxtron FOT sensing systems combine highperformance converters with an advanced light source , a proprietary software algorithm , and low-noise amplification circuitry .
The new Luxtron ® M-1100 is the latest FOT converter platform offering fiber optic temperature sensing for semiconductor manufacturing etch and deposition applications .
This instrument provides temperature measurements from -200 ° C ( the start of the cryogenic range ), to ‘ hot chuck ’ temperatures of 450 ° C with industryleading accuracy of +/ - 0.1 ° C and stability of +/ - 0.05 ° C . Integration of five channels facilitates connection to multiple probes using a single converter , while flexible communication outputs simplify digital monitoring , status monitoring and system integration . In addition , the Luxtron
M-1100 is the first model to offer both analog and EtherCAT communication interfaces .
The new converter simplifies implementation by enabling wallmounting on the side of the system being monitored . User experience is further enhanced with support from Advanced Energy ’ s global engineering and applications teams , which collaborate with OEMs to develop custom probes for leading edge applications . www . advancedenergy . com | info @ aei . com
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