MEASUREMENTS & MONITORING
Advanced Engineering Products and Services for the Manufacturing Industry Experts in Press Protection , Quality Assurance and Productivity
• Load Monitoring and Automation Systems for manufacturing equipment
• Process monitoring and control for assembly machines
• Manufacturing Execution Systems including downtime analysis
• Production recording systems
• Bespoke control systems
• Calibration services
• Repair / Maintenance
SENSE MONITOR
TRIGGER ACT
SEMOTA is a hardware and software solution with a web-based application that enables the remote monitoring of any load cell , force , torque or pressure sensor using our
Wi-Fi enabled hardware
Three years data storage
Three years rolling data retention
Live dashboards
Create real-time dashboards to analyze data and control devices
Events engine
Keep operators on-the-ball and informed
Synthetic Variables
Transform raw data into insights
Decade Monitoring Solutions Ltd Unit 3 , Octagon Business Centre , Miller St , Birmingham , B6 4NH Telephone : + 44 ( 0 ) 121 359 3978 E-mail : sales @ decade . co . uk www . decade . co . uk
Interface Force Measurements Ltd Ground Floor , Unit 19 , Duke ’ s Ride , Wellington Business Park Crowthorne , Berkshire RG45 6LS
User management
Build applications to best fit the operator ’ s needs
Tel : + 44 ( 0 ) 1344 776666 | Email : info @ interface . uk . com | www . interface . uk . com
Fiber Optic Temperature Monitoring for Semiconductor Production Processes
Advanced Energy is a specialist in semiconductor manufacturing solutions , offering highly accurate power delivery , frequency tuning , and multi-level pulsing solutions for advanced plasma control in critical etching , deposition , inspection , implantation , and annealing processes .
Optimizing yield and throughput requires highly accurate temperature measurement and control . Fiber optic based FOT technologies are becoming increasingly important .
AE ’ s Luxtron range of fiber optic thermography technologies that have
been designed to support precise process control for customer innovations . Leveraging fiber optic probes with phosphor sensor technology , Luxtron FOT sensing systems combine highperformance converters with an advanced light source , a proprietary software algorithm , and low-noise amplification circuitry .
The new Luxtron ® M-1100 is the latest FOT converter platform offering fiber optic temperature sensing for semiconductor manufacturing etch and deposition applications .
This instrument provides temperature measurements from -200 ° C ( the start of the cryogenic range ), to ‘ hot chuck ’ temperatures of 450 ° C with industryleading accuracy of +/ - 0.1 ° C and stability of +/ - 0.05 ° C . Integration of five channels facilitates connection to multiple probes using a single converter , while flexible communication outputs simplify digital monitoring , status monitoring and system integration . In addition , the Luxtron
M-1100 is the first model to offer both analog and EtherCAT communication interfaces .
The new converter simplifies implementation by enabling wallmounting on the side of the system being monitored . User experience is further enhanced with support from Advanced Energy ’ s global engineering and applications teams , which collaborate with OEMs to develop custom probes for leading edge applications . www . advancedenergy . com | info @ aei . com
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