JEOS RP ISSN03 | Page 512

J. Eur. Opt. Society-Rapid Publ. 22, 51( 2026) 505
Figure 8. Three-dimensional plots for the indentations( A) Sample # 1 and( B) Sample # 2. The plotted surface height values are given for every pixel where IF > 1.5. In addition, the OCT measurements of the initial indentations( C, D) are shown for comparison.
Figure 9. Visualization of the SSD-affected topography depending on the chosen IF threshold.
total extent of the prominent ring at z height of �11.8 lmis missing, which clearly occurs in Figure 9C for an IF threshold set to 1.5.
Finally, the impact of the IF threshold on the determination of the SSD depth is shown. Figure 10A reveals that the choice of the IF values has only a marginal influence on the resulting SSD depth. For small etching steps, as given for Sample # 1( see Fig. 6), the determined SSD depth changes for IF > 3.0 for the first time. For larger etching removal in the case of Sample # 2 shown in Figure 7, the influence is slightly higher. Here, the change of the SSD depth appears already for IF > 1.9. Overall, the SSD depth calculated with IF > 1.5, which was also applied before to visualize the SSD-affected topography, matches the results