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QNL and the resulting lower refractive of n = 1.8 instead of n = 2.1, the width of the high reflection region is narrower. The second design describes an antireflection coating that was coated on both sides of a quartz glass. For this design, which consists of a total of 6 layers on each side, a QNL setting with a refractive index of n = 1.6 was used. This also shifted the absorption edge by about 60 nm, resulting in a significantly larger usable range. This allows us to significantly expand the application range of Ta 2 O 5 by structuring it with SiO 2 as laminates into a range that would normally not be achievable with Ta 2 O 5 as bulk material in a system at all.
Funding
This work is funded by Innosuisse, the Swiss agency for innovation promotion in the project 110.023 IP-ENG“ QUINTESSENCE – Quantized nanolaminates as industrial magnetron sputtering process”.
Conflicts of interest There is no conflict of interests.
Data availability statement
Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.
Author contribution statement
Conceptualization: Manuel Bärtschi, Stephan Waldner, Silvia Schwyn Thöny, Xavier Maeder, Vivek Devulapalli, Fabian Steger, Thomas Frei. Optical designs: Manuel Bärtschi. Process development: Manuel Bärtschi, Fabian Steger. Monitoring strategy: Stephan Waldner, Thomas Frei, Manuel Bärtschi.
Measurements: Manuel Bärtschi, Xavier Maeder, Vivek Devulapalli, Fabian Steger. Software: Thomas Frei, Manuel Bärtschi. Analysis: Manuel Bärtschi. Visualization: Manuel Bärtschi, Silvia Schwyn Thöny. Writing: Manuel Bärtschi. Review: Stephan Waldner, Silvia Schwyn Thöny, Xavier Maeder.
References
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