JEOS RP ISSN01 | Page 244

J. Eur. Opt. Society-Rapid Publ. 21, 24( 2025) 239
Figure
6. High-angle annular dark-field scanning transmission electron microscopy( STEM HAADF) image of a QNL cross-section which took 30 min of deposition time with rotating table at 6 s / pass. Measured at EMPA using a Titan Themis 200 G3.
Figure 7. STEM HAADF image with a line scan for intensity shows a high level of agreement with the calculated thicknesses.
of pure Ta 2 O 5 to show the difference. The design was created in two variants: a classic one using Ta 2 O 5 as the high refractive index material and SiO 2 as the low-refractiveindex material, consisting of a total of 40 layers. The same analogue design with 40 layers was also created using the selected QNL setting to replace Ta 2 O 5 as high refractive material, with slight adjustments. This design consists of 20 layers of SiO 2 and 20 layers of QNLs, arranged