222
J. Eur. Opt. Society-Rapid Publ. 21, 22( 2025)
Visualization: Sebastian Henkel, Daniel P. Knoche, Sarah Koch
Writing – original draft: Sarah Koch, Sebastian Henkel, Jens Bliedtner
Writing – review & editing: Sarah Koch, Sebastian Henkel, Jens Bliedtner
References
1 Ghosh G, Sidpara A, Bandyopadhyay PP, Review of several precision finishing processes for optics manufacturing, J. Micromanufact. 1( 2), 170 – 188( 2018). https:// doi. org / 10.1177 / 2516598418777315.
2 Guo L, Zhang X, Chen S, et al. An experimental study on the precision abrasive machining process of hard and brittle materials with ultraviolet-resin bond diamond abrasive tools. Materials( Basel, Switzerland) 12, 1( 2019). https:// doi. org / 10.3390 / ma12010125.
3 Löffler-Mang M, Naumann H, Schröder G( Hrsg.), Handbuch Bauelemente der Optik – Grundlagen, Werkstoffe, Geräte, Messtechnik, Hanser( München, 2020).
4 Kumar S, Tong Z, Jiang X, Advances in the design and manufacturing of novel freeform optics, Int. J. Extreme Manufact. 4, 32004( 2022). https:// doi. org / 10.1088 / 2631- 7990 / ac7617.
5 Brinksmeier E, Mutlugünes Y, Klocke F, et al., Ultraprecision grinding, CIRP Ann. 59( 2), 652 – 671( 2010). https:// doi. org / 10.1016 / j. cirp. 2010.05.001.
6 Zhang Z, Yan J, Kuriyagawa T, Manufacturing technologies toward extreme precision, Int. J. Extreme Manufact. 1( 2), 22001( 2019). https:// doi. org / 10.1088 / 2631-7990 / ab1ff1. 7 Schindler K, Kirsten N, Farker M, et al., Werkstoffe, Verfahren und Prüftechnik für Feinoptiker( OptoNet e. V, Jena, 2009).
8 Bliedtner J, Optiktechnologie – Grundlagen – Verfahren – Anwendungen – Beispiele( Carl Hanser Verlag München, 2022). ISBN 978-3-446-46055-3. 9 Klocke F, Fertigungsverfahren 2( Springer Berlin, Heidelberg, Berlin, 2017). ISBN 978-3-662-53309-3.
10 Bifano TG, Bierden PA, Fixed-abrasive grinding of brittle hard-disk substrates, Int. J. Mach. Tools Manuf. 37( 7), 935 – 946( 1997). https:// doi. org / 10.1016 / S0890-6955( 96) 00089-2.
11 Li Y, Zheng N, Li H, et al., Morphology and distribution of subsurface damage in optical fused silica parts: Boundabrasive grinding, Appl. Surface Sci. 257( 6), 2066 – 2073( 2011). https:// doi. org / 10.1016 / j. apsusc. 2010.09.051.
12 Yin J, Bai Q, Zhang B, Methods for detection of subsurface damage: a review, Chinese Journal of Mechanical Engineering 31( 1), 1 – 14( 2018). https:// doi. org / 10.1186 / s10033-018-0229-2.
13 Frank S, Seiler M, Bliedtner J, Three-dimensional evaluation of subsurface damage in optical glasses with ground and polished surfaces using FF-OCT, Appl. Opt. 60( 8), 2118( 2021). https:// doi. org / 10.1364 / AO. 413090.
14 Wang J, Li Y, Han J, et al., Evaluating subsurface damage in optical glasses. J. Eur. Opt. Society-Rapid Publ.( 2011). https:// doi. org / 10.2971 / jeos. 2011.11001.
15 Bleicher F, Brier J, Schwingungsunterstützte Schleifbearbeitung, in: Schweizer Schleif-Symposium( ETH Zürich, 2016).
16 Ion J, Laser processing of engineering materials,( Elsevier / Butterworth-Heinemann, 2005). ISBN 978-0-7506-6079-2.
17 Shahinian H, Zaytsev D, Navare J, et al., Micro Laser Assisted Machining( l-LAM) of precision optics, in: Design and Fabrication Congress 2019( Freeform, OFT, 2019).
18 Shahinian H, Navare J, Zaytsev D, Microlaser assisted diamond turning of precision silicon optics, Opt. Eng. 58( 09), 1( 2019). https:// doi. org / 10.1117 / 1. OE. 58.9.092607.
19 Mohammadi H, Patten JA, Laser augmented diamond drilling: a new technique to drill hard and brittle materials, Proc. Manuf. 5, 1337 – 1347( 2016). https:// doi. org / 10.1016 / j. promfg. 2016.08.104.
20 Kong X, et al., Cutting performance and tool wear in laserassisted grinding of SiCf / SiC ceramic matrix composites, Mater. Res. Express 9, 125601( 2022). https:// doi. org / 10.1088 / 2053-1591 / aca6c5.
21 Kim M, Bang S, Kim DH, et al., Hybrid CO 2 laser-polishing process for improving material removal of silicon carbide, Int. J. Adv. Manuf. Technol. 106, 3139 – 3151( 2020). https:// doi. org / 10.1007 / s00170-019-04846-0.
22 Chen X, Liu C, Ke J, et al., Subsurface damage and phase transformation in laser-assisted nanometric cutting of single crystal silicon. Mater. Des. 190, 108524( 2020). https:// doi. org / 10.1016 / j. matdes. 2020.108524.
23 Chang WL, Luo XC, Zhao QL, et al., Laser assisted micro grinding of high strength materials. Key Eng. Mater. 496, 44 – 49( 2011). https:// doi. org / 10.4028 / www. scientific. net / KEM. 496.44.
24 Yang S, Matthews M, Elhadj S, Cooke D, Comparing the use of mid-infrared versus far-infrared lasers for mitigating damage growth on fused silica, Appl. Opt. V 49, 2606 – 2616( 2010). https:// doi. org / 10.1364 / AO. 49.002606.
25 Stover JC, Optical scattering: measurement and analysis, in: International Symposium on Optical Applied Science and Engineering( 1991). ISBN 0-8194-0658-9.
26 Ozaki Y, Morisawa Y, Ikehata A, Higashi N, Far-ultraviolet spectroscopy in the solid and liquid states: a review, Appl. Spectrosc. 66( 1), 1 – 25( 2012). https:// doi. org / 10.1366 / 11- 06496.