JEOS RP ISSN01 | Página 145

140 J. Eur. Opt. Society-Rapid Publ. 21, 12( 2025)
Acknowledgments
HM and TA thank T. Liebeskind for chemical sample preparation but also N. Schönherr and J. Griebel für FT-IR and XRD measurements. SH and JB thank M. Binder for PSD evaluation of ground sample topographies.
Funding
This work was supported by financial support by German Federal Ministry of Education and Research( BMBF) within the framework of the VIP + program( No. 03VP08631)“ Validation of a new process chain for the production of freeform optics by Plasma Jet smoothing of ultra-finished freeform surfaces”.
Conflicts of interest The authors declare that they have no competing interests.
Data availability statement
All data generated or analyzed during this study are included in this published article.
Author contribution statement
HM conducted the PJP experiments and measurements, performed analysis of the results and handled the paper documentation. SH and CS conducted the grinding experiments and measurements, SH was also mainly responsible for the evaluation of the research and the writing of the paper for this part. SF contributed the design and construction of the Alvarez geometry. JB contributed significantly to the evaluation and interpretation of the results with his expertise in the field of manufacturing technologies, and corrected and expanded the manuscript. TA wrote MATLAB fitting routines, offered valuable advice for the interpretation of PJP data and took extensive care of correction of the manuscript to present the data more clearly. The authors have read and approved the final manuscript.
References
1 Falaggis K et al., Freeform optics: introduction, Opt. Express 30, 4( 2022). https:// doi. org / 10.1364 / OE. 454788.
2 Rolland JP et al., Freeform optics for imaging, Optica 8, 2( 2021). https:// doi. org / 10.1364 / optica. 413762.
3 Shaping Europe’ s digital future: European Commision; 2022 [ Available from: https:// digital-strategy. ec. europa. eu / en / policies / photonics. 4 Schindler K, Farker M, in Werkstoffe, Verfahren und
Prüftechnik für Feinoptiker( OptoNet, Jena, Germany, 2009). 5 Brinksmeier E et al., Ultra-precision grinding, CIRP Ann. 59, 2( 2010). https:// doi. org / 10.1016 / j. cirp. 2010.05.001.
6 Klocke F, in Fertigungsverfahren 2: Zerspanung mit geometrisch unbestimmter Schneide, 5th edn.( Springer-Verlag, Berlin, 2017).
7 Zhong Y et al., Experimental study on surface integrity and subsurface damage of fused silica in ultra-precision grinding, Int. J. Adv. Manuf. Technol. 115, 11( 2021). https:// doi. org / 10.1007 / s00170-021-07439-y.
8 Bliedtner J, in Optiktechnologie: Grundlagen – Verfahren – Anwendung – Beispiele, 3rd edn.( Carl Hanser Verlag, München, 2022).
9 Wang J et al., Evaluating subsurface damage in optical glasses, J. Eur. Opt. Soc. Rapid Publ. 6, 11001( 2011). https:// doi. org / 10.1051 / jeos. 2011.11001.
10 Bifano TG, Dow TA, Scattergood RO, Ductile-regime grinding: a new technology for machining brittle materials, J. Manuf. Sci. Eng. 113, 2( 1991). https:// doi. org / 10.1115 / 1.2899676.
11 Bifano TG, Bierden PA, Fixed-abrasive grinding of brittle hard-disk substrates, Int. J. Mach. Tools Manuf. 37, 7( 1997). https:// doi. org / 10.1016 / S0890-6955( 96) 00089-2.
12 Kitzig-Frank H, Azarhoushang B, Shamray S, in Moderne Schleiftechnologie und Feinstbearbeitung, 2018( Kompetenzzentrum für Spanende Fertigung( KSF), Hochschule Furtwangen, Villingen-Schwenningen, Germany, 2018).
13 Zhang Z, Yan J, Kuriyagawa T, Manufacturing technologies toward extreme precision, Int. J. Extrem. Manuf. 1, 2( 2019). https:// doi. org / 10.1088 / 2631-7990 / ab1ff1.
14 Henkel S et al., in Fourth European Seminar on Precision Optics Manufacturing, TH Deggendorf, 2017( SPIE, Bellingham, WA, USA, 2017). https:// doi. org / 10.1117 / 12.2269500.
15 Binder M et al., in EOSAM, Porto, Portugal, 2020( EPJ Web of Conferences, Les Ulis, France, 2020). https:// doi. org / 10.1051 / epjconf / 202023803010.
16 Schulze C, Henkel S, Bliedtner J, in EOSAM 2020, 2020( EPJ Web of Conferences, Les Ulis, France, 2020). https:// doi. org / 10.1051 / epjconf / 202023803011.
17 Henkel S et al., in SPIE Optifab, Rochester, New York, United States, 2017( SPIE, 2017). https:// doi. org / 10.1117 / 12.2277189.
18 Wang C et al., Modeling of the static tool influence function of bonnet polishing based on FEA, Int. J. Adv. Manuf. Technol. 74, 1 – 4( 2014). https:// doi. org / 10.1007 / s00170- 014-6004-3.
19 Cao ZC, Cheung CF, Liu MY, Model-based self-optimization method for form correction in the computer controlled bonnet polishing of optical freeform surfaces, Opt. Express 26, 2( 2018). https:// doi. org / 10.1364 / OE. 26.002065.
20 Blalock T, Medicus K, DeGroote Nelson J, in Optical Manufacturing and Testing XI, San Diego, California, 2015( SPIE, 2015). https:// doi. org / 10.1117 / 12.2188523.
21 Hecht K, in Entwicklung eines Laserstrahlpolierverfahrens für Quarzglasoberflächen( Technical University Ilmenau, Ilmenau, 2012).
22 Zhao L et al., Formation mechanism of a smooth, defect-free surface of fused silica optics using rapid CO 2 laser polishing, Int. J. Extrem. Manuf. 1, 3( 2019). https:// doi. org / 10.1088 / 2631-7990 / ab3033.
23 Temmler A, Willenborg E, Wissenbach K, in Laser Applications in Microelectronic and Optoelectronic Manufacturing( LAMOM) XVII, San Francisco, California, 2012( SPIE, 2012). https:// doi. org / 10.1117 / 12.906001.
24 Nowak KM, Baker HJ, Hall DR, Efficient laser polishing of silica micro-optic components, Appl. Opt. 45, 1( 2006). https:// doi. org / 10.1364 / AO. 45.000162.
25 Weingarten C et al., Laser polishing and laser shape correction of optical glass, JLasA 29, 1( 2017). https:// doi. org / 10.2351 / 1.4974905.
26 Paetzelt H, Böhm G, Arnold T, in 13th euspen International Conference, Berlin, 2013( EUSPEN, 2013), pp. 19 – 22.
27 Arnold T et al., in EOS Optical Technologies, München, 2019( EPJ Web of Conferences, 2019). https:// doi. org / 10.1051 / epjconf / 201921503003.
28 Li R, Li Y, Deng H, Plasma-induced atom migration manufacturing of fused silica, Precis. Eng. 76, 305 – 313( 2022). https:// doi. org / 10.1016 / j. precisioneng. 2022.04.005.