KEY
APPLICATIONS
COULOMETRIC SENSING PROVIDES
ESSENTIAL TRACE AND ULTRA-TRACE
OXYGEN MEASUREMENTS FOR MANY
INDUSTRIES. WE HIGHLIGHT TWO
IMPORTANT APPLICATIONS THAT RELY
ON THE ACCURACY AND SENSITIVITY OF
THE COULOMETRIC GAS ANALYZER.
POST-PURIFIER MEASUREMENTS IN SEMICONDUCTOR
WAFER MANUFACTURING COULOMETRIC OXYGEN ANALYSIS IN AIR
SEPARATION PROCESSES
Gases are supplied to
semiconductor customers in
multiple forms, including an on-
site Air Separation Unit (ASU),
bulk tube trailers and bulk tanks. Nitrogen (N 2 ), oxygen (O 2 ) and
argon (Ar) need to be measured
as impurities at various points
across the Air Separation Unit
ASU process.
Semiconductor companies use
purifiers to ensure that only
the purest gases enter the
process environment.
To monitor successful purification,
stationary analytical systems are
installed to monitor bulk gases in
post-purifier locations. Typically,
these contain multiple analyzers
for each gas, and it is common to
have between 10 and 20 analyzers
per system. Each of these systems
is integrated into the building
management system using digital
connectivity to collect and trend
gas purity data.
Servomex provides a trusted,
complete gas analysis system for
the ultra-high-purity (UHP) gases
in the semiconductor industry.
Oxygen (O 2 ) analysis is provided
by the DF-500 range.
This provides Coulometric sensing
with Lower Detection Limits of
200 parts per trillion (ppt) from
the DF-550E model and 45ppt
from the DF-560E, delivering the
best ultra-trace analysis available
to the industry.
In addition, mobile analytical carts
are widely used by manufacturing
locations to ensure the quality
of specific gas line installations.
This is because each new gas line
in a semiconductor fab must be
qualified before use in production
– impurity analysis is a key
parameter in this. Again, the
DF-500 range provides the trace-
level O 2 measurements required.
When verifying the quality of Ar
and N 2 product streams, O 2
analysis at parts per billion (ppb)
levels is needed to ensure purity.
SERVOPRO
MonoExact DF310E
TRACE OXYGEN
Touchscreen GUI
Advanced digital communications
Compact footprint for
simple integration
FIXED RACK SYSTEM
PORTABLE CART SYSTEM
The analytical platform used
depends on ASU plant conditions,
but typically the SERVOPRO
MonoExact DF310E or SERVOPRO
MultiExact 4100 is configured
with a Coulometric sensor for
this application.
O 2
Both these analyzers provide an
advanced gas monitoring platform
that combines the benefits of
Coulometric technology with
digital connectivity and
intelligent processing. They are
particularly applied near the
end of the ASU process, before
each gas reaches the product
compression stage.
SERVOPRO
MultiExact 4100
MULTI-GAS
Measures up to four gas
streams simultaneously
Up to 32 alarms and 32 relays
Digital communications
for remote access
INTUITIVE GAS SOFTWARE
See our solutions for wafer manufacturing: servomex.com/dfhighpurity
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Servomex’s Coulometric sensor
can readily supply these
measurements, making it ideal for
quality analysis of the end product.
Discover our solutions across the ASU process: servomex.com/servopro
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