INDUSTRY LEADING
ULTRA-TRACE COULOMETRIC
O 2 ANALYZERS
APPLICATIONS
• Continuous quality control monitoring
• Inert gas control checks for electronics-grade gases
• Post-purifier quality certification
• Leak detection for electronics grade gases
PERFORMANCE
Range: DF-550E: 0-20ppb to 0-10ppm DF-560E: 0-1ppb to 0-20ppm
DF-550E
DF-560E
Lower Detection Limit: DF-550E: 200ppt DF-560E: 45ppt
Accuracy: ±3% of reading / ±3% of measurement range or ±0.1ppb
Zero drift/month: Negligible
T90 in seconds: <15 at 0.7 liters/min
KEY BENEFITS
• Ultra-trace Coulometric sensing saves costs through low maintenance and long sensor life
• Recovers quickly from process upsets and compensates for sample and flow rate fluctuations
• Industry-leading LDL ensures the best available product purity
• Just one analyzer required for O 2 measurements in a range of background gases
• Portable option makes the DF-500 range easy to carry around
Our DF-500 range of analyzers
are verified by independent
experts as measuring to the
lowest parts-per-trillion (ppt)
levels available, providing
an ideal solution for the
semiconductor industry.
Designed to monitor ultra-high-
purity (UHP) gases, they deliver
the best Lower Detection Limits
(LDL) currently attainable.
Smart firmware virtually
eliminates background noise,
enhancing accuracy, while the
Coulometric sensor needs minimal
maintenance. The highly stable
Coulometric sensor delivers a fast
response which is unaffected by
sample and flow rate changes.
This ensures sensitive and reliable
process monitoring for UHP
electronic gases, even in upset-
prone conditions.
Two models are available – the
DF-550E and DF-560E – each
providing the same value-added
benefits but optimized for
different measurement ranges.
The DF-550E measures O 2 from
0-20 parts per billion (ppb) to
0-10 parts per million (ppm),
with a highly sensitive 200ppt
LDL, while the DF-560E operates
in the 0-1ppb to 0-20ppm range
and supports the semiconductor
sector with an industry-leading
45ppt LDL.
The lightweight design also
makes the analyzer ideal
for semiconductor fabs and
analytical carts.
An annual span calibration is
required, and there is no need for
programmable cell replacement.
Find out more: servomex.com/df-500
SINGLE-SUPPLIER SOLUTION FOR UHP GAS ANALYSIS
The DF-500 range is a key
component in our total gas
analysis solution for UHP gases.
Providing the required trace and
ultra-trace O 2 measurements, it
seamlessly combines with our
DF-700 range of moisture
analyzers and the versatile
SERVOPRO NanoChrome to cover
all the required parameters.
The single-supplier solution
ensures there are no operating
conflicts between software and
hardware. It also means customers
have only one supplier to deal
with, saving time and money
while still delivering industry-best
solutions for their UHP process.
The DF-560E offers an LDL of 45ppt – equivalent to finding just 45 hairs on
all the heads of every single person in New York City, in just a few seconds.
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See the complete solution: servomex.com/totaluhp
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