SERVOPRO
PRODUCT FOCUS
SERVOPRO
NanoChrome
SAFE, STABLE AND RELIABLE
ULTRA-TRACE GAS ANALYSIS
a sub-ppb measurement of the
contaminant gases and hydrocarbons
that can be present at ultra-trace levels in
semiconductor manufacture.
The SERVOPRO NanoChrome
A high-performance analyzer specifically
designed for the semiconductor
manufacturing industry, the SERVOPRO
NanoChrome offers reliable ultra-trace
measurements of impurities in
electronic gases.
The NanoChrome is a comprehensive
solution for ultra-trace measurements of
hydrogen, methane, carbon monoxide,
carbon dioxide, nitrogen, argon and non-
methane hydrocarbon compounds in a
wide range of common background gases.
At its heart is the Plasma Emission
Detector (PED) sensor, developed by
Servomex, which offers significant
advantages over traditional Flame
Emission Detector (FID) and Reduction
Gas Detection (RGD) sensing technologies.
Using a Direct Analysis Methodology, the
NanoChrome removes the doubt associated
with FID and RGD measurements, and has
benefits for performance, safety, stability
and ongoing costs. Advanced signal
recovery, using Servomex’s patented
ProPeak filtering, delivers highly sensitive,
selective and reliable measurements.
This industry-leading accuracy ensures
maximized process uptime.
Neither a methanizer nor a flammable fuel
gas are required, so there are appreciable
cost benefits for the customer.
General Gas (G-Gas) used in a
semiconductor fab before the main
purifier, requires a Lower Detection Limit
(LDL) of around 10 parts per billion (ppb),
which can be achieved with a FID sensor.
However, the Pure Gas (P-Gas) used after the
purifier stage has much more demanding
requirements, with a LDL of 1ppb or less.
The NanoChrome offers the most stable
P-Gas analysis on the market, delivering
Comprehensive digital communication
protocols and access via a network or web
browser facilitate flexible remote device
interaction. In addition, updated software
ensures increased security and stability, using
a robust, Windows 10 operating system.
A large, clear display screen makes the
NanoChrome easy to operate, while
maintenance requirements are simple.
The non-depleting sensor and intelligent
software extends the interval between
calibrations, considerably reducing ongoing
costs across the life of the product.
A 19” rack-mountable analyzer, the
NanoChrome can be easily installed
into an existing rack system or cabinet,
or integrated into one of Servomex’s
Continuous Quality Control or Multi-gas
Monitoring Systems.
The NanoChrome can be combined with
the DF-500 ultra-trace oxygen analyzer
range and DF-700 moisture analyzer range
for a comprehensive, reliable UHP gas
analysis solution for the semiconductor
industry, all from a single supplier.
See pages 10 & 11 to learn more.
An experienced Servomex service technician can ensure high performance from start-up
ENSURE A RELIABLE MEASUREMENT FROM START-UP
SERVOPRO NanoChrome OVERVIEW
ultra-trace impurities
BACKGROUND GASES
While simple to operate, the NanoChrome is a complex device. Servomex highly
recommends the analyzer is commissioned by one of our experienced service
technicians to ensure a reliable measurement from start-up. The technician will also
provide hands-on training so that users can feel confident operating the analyzer.
We also provide lifetime service support for your product.
Find out more about service
support and commissioning:
servomex.expert/service
Watch our new NanoChrome product video:
servomex.expert/video-nanochrome
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WE CAN BUILD YOUR ANALYZER INTO A COMPLETE GAS ANALYSIS SYSTEM
Visit
servomex.expert/systems
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or contact your local business center today