The background
Case study:
Ammonia( NH 3) is an unwanted byproduct of the semiconductor fabrication process and needs to be reduced due to health, safety, and environmental reasons. Following environmental monitoring and testing, ammonia was found to be in the outlets of the ammonia abatement system at a large semiconductor plant in Europe. This led to ammonia being emitted into the atmosphere, which could cause both health and environmental risks. low NH 3 measurement for semiconductor emissions
The challenge
Most semiconductor plants have emission limits set in tons per year. However, large fabrication plants process significantly more air through their exhaust and scrubbing systems, which means there is a greater requirement to focus on the emission levels after the scrubbers, so they can be kept as low as possible.
This creates opportunities to displace existing methods, such as on-site extractive FTIR systems and stack gas sampling by external labs, with a continuous measurement technique such as cross-duct Tunable Diode Lasers.
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