APPLICATION FOCUS
A COMPLETE SOLUTION FOR SEMICONDUCTOR GAS ANALYSIS
Semiconductor manufacturing relies on the use of ultra-high purity ( UHP ) gases . Whether it ’ s the production of silicon wafers needed for semiconductor applications , or the manufacture of electronics including LED and LCD screens , even the smallest impurities in the bulk gases can cause major defects , resulting in costly scrap and waste .
Bulk gas purification techniques require continuous real-time gas monitoring to validate that quality specifications are met . Instrumentation entrusted in this role must have the lowest detection limits available , with superior uptime and reliability . Whenever possible , first-principle physics methods should be deployed in these applications , which utilize a ratiometric measuring technique . The SERVOPRO DF-700 NanoTrace product line utilizes both of these fundamentals .
As technology develops and increasingly smaller line widths are integrated in new fab production lines , the demand for lower contamination levels becomes even more important .
Additionally , it is essential that these gas measurements for quality control include all the impurities of interest , so a comprehensive solution is needed . As new electronic specialty gases come into use and older ones are phased out for sustainability reasons , fabs need analytical equipment that can meet the ever-changing market requirements .
For example , a gas analysis system measuring trace oxygen will help prevent oxidation and other reactions from affecting the process , but if there is no trace-level moisture monitoring , contamination will still occur .
Creating a full-coverage system with equipment sourced from different suppliers can lead to integration issues between hardware and software . Servomex provides a single-supplier solution for all UHP measurements in semiconductor applications , making integration much easier , because you only are dealing with one supplier .
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