PRODUCT FOCUS
THE FIRST CHOICE IN MOISTURE ANALYSIS FOR SEMICONDUCTORS
Our SERVOPRO DF-750 NanoTrace ULTRA analyzer delivers industry-leading moisture measurements for the ultra-high purity gases used in 300mm semiconductor fabs .
Operating in a wide range of background gases , it uses highly accurate Tunable Diode Laser Absorption Spectroscopy ( TDLAS ) sensing technology for an industry-best LDL of 55ppt
SERVOPRO DF-760E NanoTrace ULTRA
A DUAL-MEASUREMENT SOLUTION
The SERVOPRO DF-760E NanoTrace ULTRA combines the industry-leading properties of Servomex ’ s non-depleting Coulometric sensor and robust TDL technology within a single compact unit .
Delivering a compact integrated solution for the simultaneous monitoring of trace moisture and trace oxygen , it is ideal for monitoring the UHP bulk gases used in the manufacture of integrated circuit boards .
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