PURITY & SPECIALTY APPLICATION
ULTRA-HIGH PURITY GASES AND SEMICONDUCTORS
Ultra-high purity ( UHP ) gases play an essential role in semiconductor manufacturing and the production of electronics such as LED and LCD displays .
Manufacturing silicon wafers requires the use of ultra-pure gases to avoid contamination . Strict procedures , including multiple gas purification techniques , are used to ensure that ultra-high-purity gases are delivered to the manufacturing process . This requires accurate gas monitoring at very low levels of concentration .
Even the smallest impurities can cause major defects in a wafer , leading to costly scrap and waste . Quality control gas measurements are vital , but must cover all the impurities present .
For example , adequate trace oxygen analysis will prevent oxidation and other reactions from affecting the process , but if trace-level moisture is missed , contamination will still occur .
A comprehensive solution for all impurities is required , but this can lead to integration issues between hardware and software from different sources .
P10